JPS5378767A - Electric plating method to semiconductor substrate - Google Patents

Electric plating method to semiconductor substrate

Info

Publication number
JPS5378767A
JPS5378767A JP15529376A JP15529376A JPS5378767A JP S5378767 A JPS5378767 A JP S5378767A JP 15529376 A JP15529376 A JP 15529376A JP 15529376 A JP15529376 A JP 15529376A JP S5378767 A JPS5378767 A JP S5378767A
Authority
JP
Japan
Prior art keywords
plating method
semiconductor substrate
electric plating
substrate
shottky
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15529376A
Other languages
Japanese (ja)
Other versions
JPS542541B2 (en
Inventor
Kinshiro Kosemura
Shigeru Furuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15529376A priority Critical patent/JPS5378767A/en
Publication of JPS5378767A publication Critical patent/JPS5378767A/en
Publication of JPS542541B2 publication Critical patent/JPS542541B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE:To make it possible to directly attach shottky metal in order that the substrate is not contaminated by the positive ion in the plating solution, namely without forming the intermediate layer, in the process of making the shottky metal adhere to GaAs substrate by the electric plating method.
JP15529376A 1976-12-23 1976-12-23 Electric plating method to semiconductor substrate Granted JPS5378767A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15529376A JPS5378767A (en) 1976-12-23 1976-12-23 Electric plating method to semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15529376A JPS5378767A (en) 1976-12-23 1976-12-23 Electric plating method to semiconductor substrate

Publications (2)

Publication Number Publication Date
JPS5378767A true JPS5378767A (en) 1978-07-12
JPS542541B2 JPS542541B2 (en) 1979-02-08

Family

ID=15602717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15529376A Granted JPS5378767A (en) 1976-12-23 1976-12-23 Electric plating method to semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS5378767A (en)

Also Published As

Publication number Publication date
JPS542541B2 (en) 1979-02-08

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