JPS5372460A - Plasma cvd unit - Google Patents
Plasma cvd unitInfo
- Publication number
- JPS5372460A JPS5372460A JP14777176A JP14777176A JPS5372460A JP S5372460 A JPS5372460 A JP S5372460A JP 14777176 A JP14777176 A JP 14777176A JP 14777176 A JP14777176 A JP 14777176A JP S5372460 A JPS5372460 A JP S5372460A
- Authority
- JP
- Japan
- Prior art keywords
- plasma cvd
- cvd unit
- electrode
- unit
- enlarge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5096—Flat-bed apparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To prevent the other electrode from being contaminated and to enlarge the life of electrode, by providing the quartz cover to one electrode holding the treated body and by limiting the place of reaction in the vicinity of the electrodes.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14777176A JPS5372460A (en) | 1976-12-10 | 1976-12-10 | Plasma cvd unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14777176A JPS5372460A (en) | 1976-12-10 | 1976-12-10 | Plasma cvd unit |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5372460A true JPS5372460A (en) | 1978-06-27 |
JPS6132811B2 JPS6132811B2 (en) | 1986-07-29 |
Family
ID=15437800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14777176A Granted JPS5372460A (en) | 1976-12-10 | 1976-12-10 | Plasma cvd unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5372460A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5562160A (en) * | 1978-11-01 | 1980-05-10 | Canon Inc | Forming method for film by glow discharge |
JPS5675565A (en) * | 1979-11-20 | 1981-06-22 | Sumitomo Electric Ind Ltd | Manufacturing method of thin film |
JPS58104015A (en) * | 1981-12-11 | 1983-06-21 | Canon Inc | Apparatus for preparation of deposited film |
JPS5950166A (en) * | 1982-09-13 | 1984-03-23 | Toshiba Corp | Thin film forming device by glow discharge |
JPS61187375U (en) * | 1985-05-15 | 1986-11-21 | ||
JPH01115235U (en) * | 1988-01-29 | 1989-08-03 | ||
JPH0525647A (en) * | 1991-02-12 | 1993-02-02 | Fujitsu Ltd | Plasma vapor growth method |
JP2009062579A (en) * | 2007-09-06 | 2009-03-26 | Fuji Electric Systems Co Ltd | Film deposition system |
-
1976
- 1976-12-10 JP JP14777176A patent/JPS5372460A/en active Granted
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5562160A (en) * | 1978-11-01 | 1980-05-10 | Canon Inc | Forming method for film by glow discharge |
JPS5675565A (en) * | 1979-11-20 | 1981-06-22 | Sumitomo Electric Ind Ltd | Manufacturing method of thin film |
JPS58104015A (en) * | 1981-12-11 | 1983-06-21 | Canon Inc | Apparatus for preparation of deposited film |
JPS5950166A (en) * | 1982-09-13 | 1984-03-23 | Toshiba Corp | Thin film forming device by glow discharge |
JPH0569913B2 (en) * | 1982-09-13 | 1993-10-04 | Tokyo Shibaura Electric Co | |
JPS61187375U (en) * | 1985-05-15 | 1986-11-21 | ||
JPH01115235U (en) * | 1988-01-29 | 1989-08-03 | ||
JPH0525647A (en) * | 1991-02-12 | 1993-02-02 | Fujitsu Ltd | Plasma vapor growth method |
JP2009062579A (en) * | 2007-09-06 | 2009-03-26 | Fuji Electric Systems Co Ltd | Film deposition system |
Also Published As
Publication number | Publication date |
---|---|
JPS6132811B2 (en) | 1986-07-29 |
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