JPS5371564A - Forming method for through hole on insulating film - Google Patents

Forming method for through hole on insulating film

Info

Publication number
JPS5371564A
JPS5371564A JP14651576A JP14651576A JPS5371564A JP S5371564 A JPS5371564 A JP S5371564A JP 14651576 A JP14651576 A JP 14651576A JP 14651576 A JP14651576 A JP 14651576A JP S5371564 A JPS5371564 A JP S5371564A
Authority
JP
Japan
Prior art keywords
hole
insulating film
forming method
lift
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14651576A
Other languages
Japanese (ja)
Inventor
Tadao Kachi
Yoshio Honma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14651576A priority Critical patent/JPS5371564A/en
Publication of JPS5371564A publication Critical patent/JPS5371564A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To form a fine electrode connection hole and through hole on an insulating film by using lift-off materials.
COPYRIGHT: (C)1978,JPO&Japio
JP14651576A 1976-12-08 1976-12-08 Forming method for through hole on insulating film Pending JPS5371564A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14651576A JPS5371564A (en) 1976-12-08 1976-12-08 Forming method for through hole on insulating film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14651576A JPS5371564A (en) 1976-12-08 1976-12-08 Forming method for through hole on insulating film

Publications (1)

Publication Number Publication Date
JPS5371564A true JPS5371564A (en) 1978-06-26

Family

ID=15409375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14651576A Pending JPS5371564A (en) 1976-12-08 1976-12-08 Forming method for through hole on insulating film

Country Status (1)

Country Link
JP (1) JPS5371564A (en)

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