JPS5368980A - Photo mask and its production - Google Patents

Photo mask and its production

Info

Publication number
JPS5368980A
JPS5368980A JP14528576A JP14528576A JPS5368980A JP S5368980 A JPS5368980 A JP S5368980A JP 14528576 A JP14528576 A JP 14528576A JP 14528576 A JP14528576 A JP 14528576A JP S5368980 A JPS5368980 A JP S5368980A
Authority
JP
Japan
Prior art keywords
accuracy
production
photo mask
master mask
pitch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14528576A
Other languages
Japanese (ja)
Inventor
Yasuo Kinoshita
Kyusaku Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14528576A priority Critical patent/JPS5368980A/en
Publication of JPS5368980A publication Critical patent/JPS5368980A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To detect the absolute accuracy of the pitch accuracy and rotating accuracy of a master mask by using a reticle provided with a main scale and an auxiliary scale on a substrate and making possible the direct reading of the pitch accuracy and rotating accuracy of the master mask.
COPYRIGHT: (C)1978,JPO&Japio
JP14528576A 1976-12-02 1976-12-02 Photo mask and its production Pending JPS5368980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14528576A JPS5368980A (en) 1976-12-02 1976-12-02 Photo mask and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14528576A JPS5368980A (en) 1976-12-02 1976-12-02 Photo mask and its production

Publications (1)

Publication Number Publication Date
JPS5368980A true JPS5368980A (en) 1978-06-19

Family

ID=15381595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14528576A Pending JPS5368980A (en) 1976-12-02 1976-12-02 Photo mask and its production

Country Status (1)

Country Link
JP (1) JPS5368980A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059735A (en) * 1983-09-13 1985-04-06 Nec Corp Correcting method for division matching

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6059735A (en) * 1983-09-13 1985-04-06 Nec Corp Correcting method for division matching

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