JPS5368980A - Photo mask and its production - Google Patents
Photo mask and its productionInfo
- Publication number
- JPS5368980A JPS5368980A JP14528576A JP14528576A JPS5368980A JP S5368980 A JPS5368980 A JP S5368980A JP 14528576 A JP14528576 A JP 14528576A JP 14528576 A JP14528576 A JP 14528576A JP S5368980 A JPS5368980 A JP S5368980A
- Authority
- JP
- Japan
- Prior art keywords
- accuracy
- production
- photo mask
- master mask
- pitch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To detect the absolute accuracy of the pitch accuracy and rotating accuracy of a master mask by using a reticle provided with a main scale and an auxiliary scale on a substrate and making possible the direct reading of the pitch accuracy and rotating accuracy of the master mask.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14528576A JPS5368980A (en) | 1976-12-02 | 1976-12-02 | Photo mask and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14528576A JPS5368980A (en) | 1976-12-02 | 1976-12-02 | Photo mask and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5368980A true JPS5368980A (en) | 1978-06-19 |
Family
ID=15381595
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14528576A Pending JPS5368980A (en) | 1976-12-02 | 1976-12-02 | Photo mask and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5368980A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6059735A (en) * | 1983-09-13 | 1985-04-06 | Nec Corp | Correcting method for division matching |
-
1976
- 1976-12-02 JP JP14528576A patent/JPS5368980A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6059735A (en) * | 1983-09-13 | 1985-04-06 | Nec Corp | Correcting method for division matching |
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