JPS5368081A - Manufacture of mos-structure field effect type semiconductor device - Google Patents
Manufacture of mos-structure field effect type semiconductor deviceInfo
- Publication number
- JPS5368081A JPS5368081A JP14360376A JP14360376A JPS5368081A JP S5368081 A JPS5368081 A JP S5368081A JP 14360376 A JP14360376 A JP 14360376A JP 14360376 A JP14360376 A JP 14360376A JP S5368081 A JPS5368081 A JP S5368081A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- mos
- semiconductor device
- type semiconductor
- field effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To manufacture a MOSFET by piling the Si layer of the same conductor type as the substrate onto the Si substrate via SiO2 film with opening and then forming the channel at the opening part.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14360376A JPS5368081A (en) | 1976-11-29 | 1976-11-29 | Manufacture of mos-structure field effect type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14360376A JPS5368081A (en) | 1976-11-29 | 1976-11-29 | Manufacture of mos-structure field effect type semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5368081A true JPS5368081A (en) | 1978-06-17 |
Family
ID=15342554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14360376A Pending JPS5368081A (en) | 1976-11-29 | 1976-11-29 | Manufacture of mos-structure field effect type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5368081A (en) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4859782A (en) * | 1971-11-25 | 1973-08-22 | ||
JPS4863681A (en) * | 1971-12-06 | 1973-09-04 | ||
JPS49104533A (en) * | 1973-02-06 | 1974-10-03 | ||
JPS5099482A (en) * | 1973-12-28 | 1975-08-07 |
-
1976
- 1976-11-29 JP JP14360376A patent/JPS5368081A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4859782A (en) * | 1971-11-25 | 1973-08-22 | ||
JPS4863681A (en) * | 1971-12-06 | 1973-09-04 | ||
JPS49104533A (en) * | 1973-02-06 | 1974-10-03 | ||
JPS5099482A (en) * | 1973-12-28 | 1975-08-07 |
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