JPS5367355A - Substituting tool for semiconductor wafer - Google Patents
Substituting tool for semiconductor waferInfo
- Publication number
- JPS5367355A JPS5367355A JP14259676A JP14259676A JPS5367355A JP S5367355 A JPS5367355 A JP S5367355A JP 14259676 A JP14259676 A JP 14259676A JP 14259676 A JP14259676 A JP 14259676A JP S5367355 A JPS5367355 A JP S5367355A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- substituting tool
- substituting
- tool
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Packaging Frangible Articles (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14259676A JPS5367355A (en) | 1976-11-27 | 1976-11-27 | Substituting tool for semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14259676A JPS5367355A (en) | 1976-11-27 | 1976-11-27 | Substituting tool for semiconductor wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5367355A true JPS5367355A (en) | 1978-06-15 |
Family
ID=15318972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14259676A Pending JPS5367355A (en) | 1976-11-27 | 1976-11-27 | Substituting tool for semiconductor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5367355A (en) |
-
1976
- 1976-11-27 JP JP14259676A patent/JPS5367355A/en active Pending
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Effective date: 20040629 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
A601 | Written request for extension of time |
Effective date: 20040929 Free format text: JAPANESE INTERMEDIATE CODE: A601 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20041115 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20041214 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20050419 |
|
A313 | Final decision of rejection without a dissenting response from the applicant |
Effective date: 20050829 Free format text: JAPANESE INTERMEDIATE CODE: A313 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20051004 |