JPS5367355A - Substituting tool for semiconductor wafer - Google Patents

Substituting tool for semiconductor wafer

Info

Publication number
JPS5367355A
JPS5367355A JP14259676A JP14259676A JPS5367355A JP S5367355 A JPS5367355 A JP S5367355A JP 14259676 A JP14259676 A JP 14259676A JP 14259676 A JP14259676 A JP 14259676A JP S5367355 A JPS5367355 A JP S5367355A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
substituting tool
substituting
tool
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14259676A
Other languages
Japanese (ja)
Inventor
Sokichi Yamagishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14259676A priority Critical patent/JPS5367355A/en
Publication of JPS5367355A publication Critical patent/JPS5367355A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain a substituting tool for the semiconductor wafer by using a boat identical to the conventional type, which can substitute even large-size wafers easily in a short time requiring no large space.
JP14259676A 1976-11-27 1976-11-27 Substituting tool for semiconductor wafer Pending JPS5367355A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14259676A JPS5367355A (en) 1976-11-27 1976-11-27 Substituting tool for semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14259676A JPS5367355A (en) 1976-11-27 1976-11-27 Substituting tool for semiconductor wafer

Publications (1)

Publication Number Publication Date
JPS5367355A true JPS5367355A (en) 1978-06-15

Family

ID=15318972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14259676A Pending JPS5367355A (en) 1976-11-27 1976-11-27 Substituting tool for semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5367355A (en)

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