JPS536568A - Liquid-phase epitaxial growth method - Google Patents

Liquid-phase epitaxial growth method

Info

Publication number
JPS536568A
JPS536568A JP8119476A JP8119476A JPS536568A JP S536568 A JPS536568 A JP S536568A JP 8119476 A JP8119476 A JP 8119476A JP 8119476 A JP8119476 A JP 8119476A JP S536568 A JPS536568 A JP S536568A
Authority
JP
Japan
Prior art keywords
liquid
epitaxial growth
phase epitaxial
growth method
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8119476A
Other languages
Japanese (ja)
Inventor
Josuke Nakada
Toshio Sogo
Kotaro Mitsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8119476A priority Critical patent/JPS536568A/en
Publication of JPS536568A publication Critical patent/JPS536568A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE:To effect uniform liquid-phase epitaxial growth by permitting spontaneous flow of heat from the wall of a reaction tube and by economically providing a given temperature difference to a molten liquid.
JP8119476A 1976-07-07 1976-07-07 Liquid-phase epitaxial growth method Pending JPS536568A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8119476A JPS536568A (en) 1976-07-07 1976-07-07 Liquid-phase epitaxial growth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8119476A JPS536568A (en) 1976-07-07 1976-07-07 Liquid-phase epitaxial growth method

Publications (1)

Publication Number Publication Date
JPS536568A true JPS536568A (en) 1978-01-21

Family

ID=13739654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8119476A Pending JPS536568A (en) 1976-07-07 1976-07-07 Liquid-phase epitaxial growth method

Country Status (1)

Country Link
JP (1) JPS536568A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2562426A (en) * 2016-02-01 2018-11-14 Tokai Rika Co Ltd Switch device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2562426A (en) * 2016-02-01 2018-11-14 Tokai Rika Co Ltd Switch device
GB2562426B (en) * 2016-02-01 2021-05-26 Tokai Rika Co Ltd Switch device

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