JPS5365673A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5365673A
JPS5365673A JP14189876A JP14189876A JPS5365673A JP S5365673 A JPS5365673 A JP S5365673A JP 14189876 A JP14189876 A JP 14189876A JP 14189876 A JP14189876 A JP 14189876A JP S5365673 A JPS5365673 A JP S5365673A
Authority
JP
Japan
Prior art keywords
transmission type
area
manufacture
semiconductor device
bottom area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14189876A
Other languages
Japanese (ja)
Inventor
Yaichiro Watakabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP14189876A priority Critical patent/JPS5365673A/en
Publication of JPS5365673A publication Critical patent/JPS5365673A/en
Pending legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To decrease the input resistance of the control electrode as well as to increase the mutual conductance in order to improve the high frequency properties, by securing a porous property for the area except for the bottom area of the second transmission type diffusion area formed on the first transmission type semiconductor substrate and by providing a diffusion region only at the concavity bottom area changed into a porous insulator film.
COPYRIGHT: (C)1978,JPO&Japio
JP14189876A 1976-11-25 1976-11-25 Manufacture of semiconductor device Pending JPS5365673A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14189876A JPS5365673A (en) 1976-11-25 1976-11-25 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14189876A JPS5365673A (en) 1976-11-25 1976-11-25 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5365673A true JPS5365673A (en) 1978-06-12

Family

ID=15302722

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14189876A Pending JPS5365673A (en) 1976-11-25 1976-11-25 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5365673A (en)

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