JPS5365673A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5365673A JPS5365673A JP14189876A JP14189876A JPS5365673A JP S5365673 A JPS5365673 A JP S5365673A JP 14189876 A JP14189876 A JP 14189876A JP 14189876 A JP14189876 A JP 14189876A JP S5365673 A JPS5365673 A JP S5365673A
- Authority
- JP
- Japan
- Prior art keywords
- transmission type
- area
- manufacture
- semiconductor device
- bottom area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Junction Field-Effect Transistors (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE: To decrease the input resistance of the control electrode as well as to increase the mutual conductance in order to improve the high frequency properties, by securing a porous property for the area except for the bottom area of the second transmission type diffusion area formed on the first transmission type semiconductor substrate and by providing a diffusion region only at the concavity bottom area changed into a porous insulator film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14189876A JPS5365673A (en) | 1976-11-25 | 1976-11-25 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14189876A JPS5365673A (en) | 1976-11-25 | 1976-11-25 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5365673A true JPS5365673A (en) | 1978-06-12 |
Family
ID=15302722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14189876A Pending JPS5365673A (en) | 1976-11-25 | 1976-11-25 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5365673A (en) |
-
1976
- 1976-11-25 JP JP14189876A patent/JPS5365673A/en active Pending
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