JPS5351962A - Dicing unit providing automatic handling mechanism - Google Patents

Dicing unit providing automatic handling mechanism

Info

Publication number
JPS5351962A
JPS5351962A JP12609176A JP12609176A JPS5351962A JP S5351962 A JPS5351962 A JP S5351962A JP 12609176 A JP12609176 A JP 12609176A JP 12609176 A JP12609176 A JP 12609176A JP S5351962 A JPS5351962 A JP S5351962A
Authority
JP
Japan
Prior art keywords
handling mechanism
unit providing
automatic handling
providing automatic
dicing unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12609176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS626344B2 (enrdf_load_stackoverflow
Inventor
Tsutomu Mimata
Akira Kabashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12609176A priority Critical patent/JPS5351962A/ja
Publication of JPS5351962A publication Critical patent/JPS5351962A/ja
Publication of JPS626344B2 publication Critical patent/JPS626344B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
JP12609176A 1976-10-22 1976-10-22 Dicing unit providing automatic handling mechanism Granted JPS5351962A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12609176A JPS5351962A (en) 1976-10-22 1976-10-22 Dicing unit providing automatic handling mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12609176A JPS5351962A (en) 1976-10-22 1976-10-22 Dicing unit providing automatic handling mechanism

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP60046594A Division JPS60216568A (ja) 1985-03-11 1985-03-11 ウエハの切削装置
JP60046592A Division JPS60216566A (ja) 1985-03-11 1985-03-11 ウエハの切削装置
JP60046593A Division JPS60216567A (ja) 1985-03-11 1985-03-11 ウエハの切削装置

Publications (2)

Publication Number Publication Date
JPS5351962A true JPS5351962A (en) 1978-05-11
JPS626344B2 JPS626344B2 (enrdf_load_stackoverflow) 1987-02-10

Family

ID=14926370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12609176A Granted JPS5351962A (en) 1976-10-22 1976-10-22 Dicing unit providing automatic handling mechanism

Country Status (1)

Country Link
JP (1) JPS5351962A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133790U (ja) * 1983-02-28 1984-09-07 株式会社東芝 スクロ−ル圧縮機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133790U (ja) * 1983-02-28 1984-09-07 株式会社東芝 スクロ−ル圧縮機

Also Published As

Publication number Publication date
JPS626344B2 (enrdf_load_stackoverflow) 1987-02-10

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