JPS5348456A - Dicing method of semiconductor substrate - Google Patents
Dicing method of semiconductor substrateInfo
- Publication number
- JPS5348456A JPS5348456A JP12353676A JP12353676A JPS5348456A JP S5348456 A JPS5348456 A JP S5348456A JP 12353676 A JP12353676 A JP 12353676A JP 12353676 A JP12353676 A JP 12353676A JP S5348456 A JPS5348456 A JP S5348456A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- dicing method
- glass plate
- grooves
- dicing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Dicing (AREA)
Abstract
PURPOSE: Pellet failure at the time of dicing a semiconductor substrate to pellets is obtained by providing ciding grooves to the semiconductor substrate and affixing the substrate and a glass plate in such a way that the grooves oppose to the glass plate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12353676A JPS5348456A (en) | 1976-10-14 | 1976-10-14 | Dicing method of semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12353676A JPS5348456A (en) | 1976-10-14 | 1976-10-14 | Dicing method of semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5348456A true JPS5348456A (en) | 1978-05-01 |
Family
ID=14863023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12353676A Pending JPS5348456A (en) | 1976-10-14 | 1976-10-14 | Dicing method of semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5348456A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5538024A (en) * | 1978-09-11 | 1980-03-17 | Toshiba Corp | Manufacturing of semiconductor device |
-
1976
- 1976-10-14 JP JP12353676A patent/JPS5348456A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5538024A (en) * | 1978-09-11 | 1980-03-17 | Toshiba Corp | Manufacturing of semiconductor device |
JPS6130740B2 (en) * | 1978-09-11 | 1986-07-15 | Tokyo Shibaura Electric Co |
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