JPS5338314A - Forming method for gap spacer - Google Patents
Forming method for gap spacerInfo
- Publication number
- JPS5338314A JPS5338314A JP11340976A JP11340976A JPS5338314A JP S5338314 A JPS5338314 A JP S5338314A JP 11340976 A JP11340976 A JP 11340976A JP 11340976 A JP11340976 A JP 11340976A JP S5338314 A JPS5338314 A JP S5338314A
- Authority
- JP
- Japan
- Prior art keywords
- forming method
- gap spacer
- grooved portions
- wafer
- uniformalize
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000005229 chemical vapour deposition Methods 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Magnetic Heads (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11340976A JPS5338314A (en) | 1976-09-20 | 1976-09-20 | Forming method for gap spacer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11340976A JPS5338314A (en) | 1976-09-20 | 1976-09-20 | Forming method for gap spacer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5338314A true JPS5338314A (en) | 1978-04-08 |
JPS5643527B2 JPS5643527B2 (enrdf_load_html_response) | 1981-10-13 |
Family
ID=14611535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11340976A Granted JPS5338314A (en) | 1976-09-20 | 1976-09-20 | Forming method for gap spacer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5338314A (enrdf_load_html_response) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5437120U (enrdf_load_html_response) * | 1977-08-19 | 1979-03-10 |
-
1976
- 1976-09-20 JP JP11340976A patent/JPS5338314A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5437120U (enrdf_load_html_response) * | 1977-08-19 | 1979-03-10 |
Also Published As
Publication number | Publication date |
---|---|
JPS5643527B2 (enrdf_load_html_response) | 1981-10-13 |
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