JPS5338263A - Plasma treating apparatus of semiconductors - Google Patents
Plasma treating apparatus of semiconductorsInfo
- Publication number
- JPS5338263A JPS5338263A JP11243576A JP11243576A JPS5338263A JP S5338263 A JPS5338263 A JP S5338263A JP 11243576 A JP11243576 A JP 11243576A JP 11243576 A JP11243576 A JP 11243576A JP S5338263 A JPS5338263 A JP S5338263A
- Authority
- JP
- Japan
- Prior art keywords
- plasma treating
- semiconductors
- treating apparatus
- parting
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11243576A JPS5338263A (en) | 1976-09-21 | 1976-09-21 | Plasma treating apparatus of semiconductors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11243576A JPS5338263A (en) | 1976-09-21 | 1976-09-21 | Plasma treating apparatus of semiconductors |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5338263A true JPS5338263A (en) | 1978-04-08 |
JPS5329575B2 JPS5329575B2 (ja) | 1978-08-22 |
Family
ID=14586552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11243576A Granted JPS5338263A (en) | 1976-09-21 | 1976-09-21 | Plasma treating apparatus of semiconductors |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5338263A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4532792A (en) * | 1982-09-08 | 1985-08-06 | Maru Kikai Kogyo Co., Ltd. | Apparatus for adjusting to tool length of panel forming machine |
US4598568A (en) * | 1983-11-19 | 1986-07-08 | Heidelberger Druckmaschinen Ag | Bending device for offset printing plates |
US4843862A (en) * | 1987-06-03 | 1989-07-04 | Salvagnini Transferica S.P.A. | Bending machine for sheet metal panels having a blank holder with uniform compression |
JPH03232224A (ja) * | 1990-02-07 | 1991-10-16 | Mitsubishi Electric Corp | プラズマ処理装置 |
-
1976
- 1976-09-21 JP JP11243576A patent/JPS5338263A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4532792A (en) * | 1982-09-08 | 1985-08-06 | Maru Kikai Kogyo Co., Ltd. | Apparatus for adjusting to tool length of panel forming machine |
US4598568A (en) * | 1983-11-19 | 1986-07-08 | Heidelberger Druckmaschinen Ag | Bending device for offset printing plates |
US4843862A (en) * | 1987-06-03 | 1989-07-04 | Salvagnini Transferica S.P.A. | Bending machine for sheet metal panels having a blank holder with uniform compression |
JPH03232224A (ja) * | 1990-02-07 | 1991-10-16 | Mitsubishi Electric Corp | プラズマ処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS5329575B2 (ja) | 1978-08-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5378170A (en) | Continuous processor for gas plasma etching | |
JPS5329076A (en) | Plasma treating apparatus of semiconductor substrates | |
JPS5338263A (en) | Plasma treating apparatus of semiconductors | |
JPS5244174A (en) | Plasma treatment device | |
JPS5216966A (en) | Magnetron | |
JPS51113433A (en) | High speed adder | |
JPS52142970A (en) | Plasma treating device | |
JPS5298475A (en) | Plasma treating apparatus | |
JPS51130156A (en) | Frequency multiplier | |
JPS5325366A (en) | Plasma treating method and apparat us | |
JPS51126070A (en) | Weber treatment equipment | |
JPS525672A (en) | Magnetic fluid recovering apparatus | |
JPS5267838A (en) | High frequency heater | |
JPS5213778A (en) | Plasma-etching method | |
JPS51115346A (en) | Induction heater | |
JPS525961A (en) | Method of destroying abominability of organic waste liquid | |
JPS51127957A (en) | Fabrication method of bag nut | |
JPS52122478A (en) | Plasma treating device | |
JPS5329074A (en) | Plasma treating apparatus for semiconductor | |
JPS5234758A (en) | Process for the fabrication of a character plate | |
JPS521247A (en) | Runner fabrication method | |
JPS51115183A (en) | Continuous packaging by gas replacement | |
JPS5345131A (en) | Magnetic circuit for magnetic bubble | |
JPS5284545A (en) | High frequency heating apparatus | |
JPS5287986A (en) | Etching method |