JPS5329575B2 - - Google Patents
Info
- Publication number
- JPS5329575B2 JPS5329575B2 JP11243576A JP11243576A JPS5329575B2 JP S5329575 B2 JPS5329575 B2 JP S5329575B2 JP 11243576 A JP11243576 A JP 11243576A JP 11243576 A JP11243576 A JP 11243576A JP S5329575 B2 JPS5329575 B2 JP S5329575B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11243576A JPS5338263A (en) | 1976-09-21 | 1976-09-21 | Plasma treating apparatus of semiconductors |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11243576A JPS5338263A (en) | 1976-09-21 | 1976-09-21 | Plasma treating apparatus of semiconductors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5338263A JPS5338263A (en) | 1978-04-08 |
| JPS5329575B2 true JPS5329575B2 (ja) | 1978-08-22 |
Family
ID=14586552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11243576A Granted JPS5338263A (en) | 1976-09-21 | 1976-09-21 | Plasma treating apparatus of semiconductors |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5338263A (ja) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5944616U (ja) * | 1982-09-08 | 1984-03-24 | 丸機械工業株式会社 | フオ−ルデイングマシン用金型交換装置 |
| DE3341924A1 (de) * | 1983-11-19 | 1985-05-30 | Heidelberger Druckmasch Ag | Biegevorrichtung fuer offsetdruckplatten |
| IT1204674B (it) * | 1987-06-03 | 1989-03-10 | Salvagnini Transferica Spa | Macchina piegatrice per fogli di lamiera con premilamiera a compressione uniforme |
| JPH03232224A (ja) * | 1990-02-07 | 1991-10-16 | Mitsubishi Electric Corp | プラズマ処理装置 |
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1976
- 1976-09-21 JP JP11243576A patent/JPS5338263A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5338263A (en) | 1978-04-08 |