JPS5336472A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5336472A
JPS5336472A JP11081076A JP11081076A JPS5336472A JP S5336472 A JPS5336472 A JP S5336472A JP 11081076 A JP11081076 A JP 11081076A JP 11081076 A JP11081076 A JP 11081076A JP S5336472 A JPS5336472 A JP S5336472A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
precisely
remove
cvd method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11081076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6112371B2 (enExample
Inventor
Isao Sakamoto
Yasutake Kuki
Akira Muramatsu
Kazuo Hoya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11081076A priority Critical patent/JPS5336472A/ja
Publication of JPS5336472A publication Critical patent/JPS5336472A/ja
Publication of JPS6112371B2 publication Critical patent/JPS6112371B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP11081076A 1976-09-17 1976-09-17 Manufacture of semiconductor device Granted JPS5336472A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11081076A JPS5336472A (en) 1976-09-17 1976-09-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11081076A JPS5336472A (en) 1976-09-17 1976-09-17 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5336472A true JPS5336472A (en) 1978-04-04
JPS6112371B2 JPS6112371B2 (enExample) 1986-04-08

Family

ID=14545223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11081076A Granted JPS5336472A (en) 1976-09-17 1976-09-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5336472A (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4845177A (enExample) * 1971-10-12 1973-06-28
JPS505915A (enExample) * 1973-05-18 1975-01-22

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4845177A (enExample) * 1971-10-12 1973-06-28
JPS505915A (enExample) * 1973-05-18 1975-01-22

Also Published As

Publication number Publication date
JPS6112371B2 (enExample) 1986-04-08

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