JPS5334465B2 - - Google Patents
Info
- Publication number
- JPS5334465B2 JPS5334465B2 JP1977276A JP1977276A JPS5334465B2 JP S5334465 B2 JPS5334465 B2 JP S5334465B2 JP 1977276 A JP1977276 A JP 1977276A JP 1977276 A JP1977276 A JP 1977276A JP S5334465 B2 JPS5334465 B2 JP S5334465B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977276A JPS52103965A (en) | 1976-02-25 | 1976-02-25 | Electron beam projector unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977276A JPS52103965A (en) | 1976-02-25 | 1976-02-25 | Electron beam projector unit |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9002879A Division JPS5536990A (en) | 1979-07-16 | 1979-07-16 | Apparatus for applying electron beam |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52103965A JPS52103965A (en) | 1977-08-31 |
JPS5334465B2 true JPS5334465B2 (bg) | 1978-09-20 |
Family
ID=12008614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1977276A Granted JPS52103965A (en) | 1976-02-25 | 1976-02-25 | Electron beam projector unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52103965A (bg) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5545513A (en) * | 1978-09-22 | 1980-03-31 | Daihen Corp | Charged particle beam machining device |
NL7904580A (nl) * | 1979-06-12 | 1980-12-16 | Philips Nv | Inrichting voor het schrijven van patronen in een laag op een substraat met een bundel elektrisch geladen deeltjes. |
JPS5627663U (bg) * | 1979-07-06 | 1981-03-14 | ||
JPS5833702Y2 (ja) * | 1981-10-29 | 1983-07-28 | 日本電信電話株式会社 | 電子ビ−ム露光装置 |
JPS5940529A (ja) * | 1982-08-31 | 1984-03-06 | Toshiba Corp | 電子ビ−ム転写装置 |
JPH077653B2 (ja) * | 1987-04-11 | 1995-01-30 | 株式会社日立製作所 | 走査電子顕微鏡による観察装置 |
JP7018098B2 (ja) * | 2020-08-13 | 2022-02-09 | 株式会社ホロン | オートフォーカス装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS497700A (bg) * | 1972-05-26 | 1974-01-23 | ||
JPS4924519A (bg) * | 1972-06-30 | 1974-03-05 |
-
1976
- 1976-02-25 JP JP1977276A patent/JPS52103965A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS497700A (bg) * | 1972-05-26 | 1974-01-23 | ||
JPS4924519A (bg) * | 1972-06-30 | 1974-03-05 |
Also Published As
Publication number | Publication date |
---|---|
JPS52103965A (en) | 1977-08-31 |