JPS5330291A - X-ray counter electrode and its production - Google Patents

X-ray counter electrode and its production

Info

Publication number
JPS5330291A
JPS5330291A JP10370976A JP10370976A JPS5330291A JP S5330291 A JPS5330291 A JP S5330291A JP 10370976 A JP10370976 A JP 10370976A JP 10370976 A JP10370976 A JP 10370976A JP S5330291 A JPS5330291 A JP S5330291A
Authority
JP
Japan
Prior art keywords
production
counter electrode
ray counter
molten metal
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10370976A
Other languages
Japanese (ja)
Other versions
JPS5611989B2 (en
Inventor
Hideo Yoshihara
Mikiho Kiuchi
Satoru Nakayama
Toa Hayasaka
Junji Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Nippon Telegraph and Telephone Corp
Original Assignee
NEC Corp
Nippon Telegraph and Telephone Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Telegraph and Telephone Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10370976A priority Critical patent/JPS5330291A/en
Publication of JPS5330291A publication Critical patent/JPS5330291A/en
Publication of JPS5611989B2 publication Critical patent/JPS5611989B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To make possible metal formation of Cr, Mo, W, etc. on a Si substrate by keeping glow discharge induced and evaporating and depositing intermediate layer forming molten metal or counter cathode forming molten metal on the counter cathode substrate in this atmosphere.
COPYRIGHT: (C)1978,JPO&Japio
JP10370976A 1976-09-01 1976-09-01 X-ray counter electrode and its production Granted JPS5330291A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10370976A JPS5330291A (en) 1976-09-01 1976-09-01 X-ray counter electrode and its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10370976A JPS5330291A (en) 1976-09-01 1976-09-01 X-ray counter electrode and its production

Publications (2)

Publication Number Publication Date
JPS5330291A true JPS5330291A (en) 1978-03-22
JPS5611989B2 JPS5611989B2 (en) 1981-03-18

Family

ID=14361250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10370976A Granted JPS5330291A (en) 1976-09-01 1976-09-01 X-ray counter electrode and its production

Country Status (1)

Country Link
JP (1) JPS5330291A (en)

Also Published As

Publication number Publication date
JPS5611989B2 (en) 1981-03-18

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