JPS5330291A - X-ray counter electrode and its production - Google Patents
X-ray counter electrode and its productionInfo
- Publication number
- JPS5330291A JPS5330291A JP10370976A JP10370976A JPS5330291A JP S5330291 A JPS5330291 A JP S5330291A JP 10370976 A JP10370976 A JP 10370976A JP 10370976 A JP10370976 A JP 10370976A JP S5330291 A JPS5330291 A JP S5330291A
- Authority
- JP
- Japan
- Prior art keywords
- production
- counter electrode
- ray counter
- molten metal
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To make possible metal formation of Cr, Mo, W, etc. on a Si substrate by keeping glow discharge induced and evaporating and depositing intermediate layer forming molten metal or counter cathode forming molten metal on the counter cathode substrate in this atmosphere.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10370976A JPS5330291A (en) | 1976-09-01 | 1976-09-01 | X-ray counter electrode and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10370976A JPS5330291A (en) | 1976-09-01 | 1976-09-01 | X-ray counter electrode and its production |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5330291A true JPS5330291A (en) | 1978-03-22 |
JPS5611989B2 JPS5611989B2 (en) | 1981-03-18 |
Family
ID=14361250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10370976A Granted JPS5330291A (en) | 1976-09-01 | 1976-09-01 | X-ray counter electrode and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5330291A (en) |
-
1976
- 1976-09-01 JP JP10370976A patent/JPS5330291A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5611989B2 (en) | 1981-03-18 |
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