JPS5328871B2 - - Google Patents
Info
- Publication number
- JPS5328871B2 JPS5328871B2 JP4301873A JP4301873A JPS5328871B2 JP S5328871 B2 JPS5328871 B2 JP S5328871B2 JP 4301873 A JP4301873 A JP 4301873A JP 4301873 A JP4301873 A JP 4301873A JP S5328871 B2 JPS5328871 B2 JP S5328871B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US24437472A | 1972-04-17 | 1972-04-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4917380A JPS4917380A (https=) | 1974-02-15 |
| JPS5328871B2 true JPS5328871B2 (https=) | 1978-08-17 |
Family
ID=22922463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4301873A Expired JPS5328871B2 (https=) | 1972-04-17 | 1973-04-16 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5328871B2 (https=) |
| BE (1) | BE798324A (https=) |
| GB (1) | GB1428702A (https=) |
| NL (1) | NL7305323A (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51107287A (ja) * | 1975-03-18 | 1976-09-22 | Fujikoshi Kk | Koshitsuhimakukeiseisochi |
| DE3163865D1 (en) * | 1980-07-01 | 1984-07-05 | Secr Defence Brit | Process for the bulk production of alloys and apparatus therefor |
| CN107513688A (zh) * | 2017-09-25 | 2017-12-26 | 江门市新合盛涂料实业有限公司 | 一种真空镀膜机 |
| CN108359934B (zh) * | 2018-03-26 | 2020-01-07 | 吉林大学 | 用于在柱型基片上均匀蒸镀材料的镀膜机的上法兰盘 |
| CN111424252A (zh) * | 2020-04-27 | 2020-07-17 | 台州市思考特机器人科技有限公司 | 一种管料加工真空镀膜箱体 |
| CN120625016B (zh) * | 2025-08-13 | 2025-10-10 | 太原师范学院 | 一种光催化材料制备装置 |
-
1973
- 1973-04-12 GB GB1767973A patent/GB1428702A/en not_active Expired
- 1973-04-16 JP JP4301873A patent/JPS5328871B2/ja not_active Expired
- 1973-04-16 NL NL7305323A patent/NL7305323A/xx not_active Application Discontinuation
- 1973-04-17 BE BE130102A patent/BE798324A/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| GB1428702A (en) | 1976-03-17 |
| JPS4917380A (https=) | 1974-02-15 |
| NL7305323A (https=) | 1973-06-25 |
| BE798324A (fr) | 1973-10-17 |