JPS5324792B2 - - Google Patents

Info

Publication number
JPS5324792B2
JPS5324792B2 JP4611977A JP4611977A JPS5324792B2 JP S5324792 B2 JPS5324792 B2 JP S5324792B2 JP 4611977 A JP4611977 A JP 4611977A JP 4611977 A JP4611977 A JP 4611977A JP S5324792 B2 JPS5324792 B2 JP S5324792B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4611977A
Other versions
JPS52120686A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4611977A priority Critical patent/JPS52120686A/ja
Publication of JPS52120686A publication Critical patent/JPS52120686A/ja
Publication of JPS5324792B2 publication Critical patent/JPS5324792B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4611977A 1977-04-21 1977-04-21 Electronic ray exposure method Granted JPS52120686A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4611977A JPS52120686A (en) 1977-04-21 1977-04-21 Electronic ray exposure method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4611977A JPS52120686A (en) 1977-04-21 1977-04-21 Electronic ray exposure method

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP3764176A Division JPS52122083A (en) 1976-04-02 1976-04-02 Electron beam exposing device

Publications (2)

Publication Number Publication Date
JPS52120686A JPS52120686A (en) 1977-10-11
JPS5324792B2 true JPS5324792B2 (ja) 1978-07-22

Family

ID=12738097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4611977A Granted JPS52120686A (en) 1977-04-21 1977-04-21 Electronic ray exposure method

Country Status (1)

Country Link
JP (1) JPS52120686A (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5543821A (en) * 1978-09-22 1980-03-27 Hitachi Ltd Electronic drawing device
JPS55146931A (en) * 1979-05-04 1980-11-15 Hitachi Ltd Depicting method by electronic beam
JPS5746835U (ja) * 1980-08-29 1982-03-16
JPS5748230A (en) * 1980-09-04 1982-03-19 Jeol Ltd Electron ray exposure
EP0053225B1 (en) * 1980-11-28 1985-03-13 International Business Machines Corporation Electron beam system and method
JPS56153739A (en) * 1981-04-09 1981-11-27 Fujitsu Ltd Exposing method for electron beam
JP4583936B2 (ja) * 2005-01-06 2010-11-17 日本電子株式会社 荷電粒子ビーム装置及び荷電粒子ビーム装置の制御方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501783A (ja) * 1973-05-02 1975-01-09
JPS5093571A (ja) * 1973-12-19 1975-07-25
JPS52122083A (en) * 1976-04-02 1977-10-13 Jeol Ltd Electron beam exposing device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS501783A (ja) * 1973-05-02 1975-01-09
JPS5093571A (ja) * 1973-12-19 1975-07-25
JPS52122083A (en) * 1976-04-02 1977-10-13 Jeol Ltd Electron beam exposing device

Also Published As

Publication number Publication date
JPS52120686A (en) 1977-10-11

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