JPS5746835U - - Google Patents

Info

Publication number
JPS5746835U
JPS5746835U JP12285480U JP12285480U JPS5746835U JP S5746835 U JPS5746835 U JP S5746835U JP 12285480 U JP12285480 U JP 12285480U JP 12285480 U JP12285480 U JP 12285480U JP S5746835 U JPS5746835 U JP S5746835U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12285480U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12285480U priority Critical patent/JPS5746835U/ja
Publication of JPS5746835U publication Critical patent/JPS5746835U/ja
Pending legal-status Critical Current

Links

JP12285480U 1980-08-29 1980-08-29 Pending JPS5746835U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12285480U JPS5746835U (ja) 1980-08-29 1980-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12285480U JPS5746835U (ja) 1980-08-29 1980-08-29

Publications (1)

Publication Number Publication Date
JPS5746835U true JPS5746835U (ja) 1982-03-16

Family

ID=29483450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12285480U Pending JPS5746835U (ja) 1980-08-29 1980-08-29

Country Status (1)

Country Link
JP (1) JPS5746835U (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52120686A (en) * 1977-04-21 1977-10-11 Jeol Ltd Electronic ray exposure method
JPS5359374A (en) * 1976-11-09 1978-05-29 Fujitsu Ltd Electron beam exposure unit
JPS5572033A (en) * 1978-11-27 1980-05-30 Toshiba Corp Electron beam exposure device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5359374A (en) * 1976-11-09 1978-05-29 Fujitsu Ltd Electron beam exposure unit
JPS52120686A (en) * 1977-04-21 1977-10-11 Jeol Ltd Electronic ray exposure method
JPS5572033A (en) * 1978-11-27 1980-05-30 Toshiba Corp Electron beam exposure device

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