JPS501783A - - Google Patents
Info
- Publication number
- JPS501783A JPS501783A JP5008173A JP5008173A JPS501783A JP S501783 A JPS501783 A JP S501783A JP 5008173 A JP5008173 A JP 5008173A JP 5008173 A JP5008173 A JP 5008173A JP S501783 A JPS501783 A JP S501783A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- Thermally Actuated Switches (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5008173A JPS5235545B2 (ja) | 1973-05-02 | 1973-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5008173A JPS5235545B2 (ja) | 1973-05-02 | 1973-05-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS501783A true JPS501783A (ja) | 1975-01-09 |
| JPS5235545B2 JPS5235545B2 (ja) | 1977-09-09 |
Family
ID=12849051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5008173A Expired JPS5235545B2 (ja) | 1973-05-02 | 1973-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5235545B2 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52120686A (en) * | 1977-04-21 | 1977-10-11 | Jeol Ltd | Electronic ray exposure method |
| JPS5357765A (en) * | 1976-11-04 | 1978-05-25 | Fujitsu Ltd | Magnetic field forming device |
| JPS53119496A (en) * | 1977-03-28 | 1978-10-18 | Nippon Electron Optics Lab | Electron ray expososing method |
| JPS5595325A (en) * | 1979-01-13 | 1980-07-19 | Nippon Telegr & Teleph Corp <Ntt> | Detecting device of marking position for electron beam exposure apparatus |
-
1973
- 1973-05-02 JP JP5008173A patent/JPS5235545B2/ja not_active Expired
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5357765A (en) * | 1976-11-04 | 1978-05-25 | Fujitsu Ltd | Magnetic field forming device |
| JPS6040186B2 (ja) * | 1976-11-04 | 1985-09-10 | 富士通株式会社 | 磁場形成装置 |
| JPS53119496A (en) * | 1977-03-28 | 1978-10-18 | Nippon Electron Optics Lab | Electron ray expososing method |
| JPS5646254B2 (ja) * | 1977-03-28 | 1981-10-31 | ||
| JPS52120686A (en) * | 1977-04-21 | 1977-10-11 | Jeol Ltd | Electronic ray exposure method |
| JPS5324792B2 (ja) * | 1977-04-21 | 1978-07-22 | ||
| JPS5595325A (en) * | 1979-01-13 | 1980-07-19 | Nippon Telegr & Teleph Corp <Ntt> | Detecting device of marking position for electron beam exposure apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5235545B2 (ja) | 1977-09-09 |