JPS5321573A - Etching method - Google Patents
Etching methodInfo
- Publication number
- JPS5321573A JPS5321573A JP9542376A JP9542376A JPS5321573A JP S5321573 A JPS5321573 A JP S5321573A JP 9542376 A JP9542376 A JP 9542376A JP 9542376 A JP9542376 A JP 9542376A JP S5321573 A JPS5321573 A JP S5321573A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- planes
- single crystal
- gas containing
- anisotropic etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9542376A JPS6050055B2 (ja) | 1976-08-12 | 1976-08-12 | エツチング方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9542376A JPS6050055B2 (ja) | 1976-08-12 | 1976-08-12 | エツチング方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5321573A true JPS5321573A (en) | 1978-02-28 |
JPS6050055B2 JPS6050055B2 (ja) | 1985-11-06 |
Family
ID=14137276
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9542376A Expired JPS6050055B2 (ja) | 1976-08-12 | 1976-08-12 | エツチング方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6050055B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56103424A (en) * | 1980-01-22 | 1981-08-18 | Toshiba Corp | Plasma etching method |
JPS56125838A (en) * | 1980-03-07 | 1981-10-02 | Hitachi Ltd | Etching method |
JPS6191928A (ja) * | 1984-10-11 | 1986-05-10 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
-
1976
- 1976-08-12 JP JP9542376A patent/JPS6050055B2/ja not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56103424A (en) * | 1980-01-22 | 1981-08-18 | Toshiba Corp | Plasma etching method |
JPS56125838A (en) * | 1980-03-07 | 1981-10-02 | Hitachi Ltd | Etching method |
JPH0130294B2 (ja) * | 1980-03-07 | 1989-06-19 | Hitachi Ltd | |
JPS6191928A (ja) * | 1984-10-11 | 1986-05-10 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6050055B2 (ja) | 1985-11-06 |
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