JPS532076B1 - - Google Patents

Info

Publication number
JPS532076B1
JPS532076B1 JP1612271A JP1612271A JPS532076B1 JP S532076 B1 JPS532076 B1 JP S532076B1 JP 1612271 A JP1612271 A JP 1612271A JP 1612271 A JP1612271 A JP 1612271A JP S532076 B1 JPS532076 B1 JP S532076B1
Authority
JP
Japan
Prior art keywords
beams
sub
another
disclosed
superimposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1612271A
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS532076B1 publication Critical patent/JPS532076B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1612271A 1970-03-25 1971-03-22 Pending JPS532076B1 (US06272168-20010807-M00014.png)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7004247A NL7004247A (US06272168-20010807-M00014.png) 1970-03-25 1970-03-25

Publications (1)

Publication Number Publication Date
JPS532076B1 true JPS532076B1 (US06272168-20010807-M00014.png) 1978-01-25

Family

ID=19809670

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1612271A Pending JPS532076B1 (US06272168-20010807-M00014.png) 1970-03-25 1971-03-22

Country Status (4)

Country Link
JP (1) JPS532076B1 (US06272168-20010807-M00014.png)
FR (1) FR2088257B2 (US06272168-20010807-M00014.png)
GB (1) GB1350440A (US06272168-20010807-M00014.png)
NL (1) NL7004247A (US06272168-20010807-M00014.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007524075A (ja) * 2003-06-19 2007-08-23 マサチユセツツ・インスチチユート・オブ・テクノロジイ 位相測定用システムと方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4576479A (en) * 1982-05-17 1986-03-18 Downs Michael J Apparatus and method for investigation of a surface
GB2250810A (en) * 1990-10-24 1992-06-17 Kevin Maurice Buckley Gravitational interferometry observatory
US7365858B2 (en) * 2001-12-18 2008-04-29 Massachusetts Institute Of Technology Systems and methods for phase measurements
US7557929B2 (en) 2001-12-18 2009-07-07 Massachusetts Institute Of Technology Systems and methods for phase measurements

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007524075A (ja) * 2003-06-19 2007-08-23 マサチユセツツ・インスチチユート・オブ・テクノロジイ 位相測定用システムと方法

Also Published As

Publication number Publication date
DE2112229A1 (de) 1971-10-14
GB1350440A (en) 1974-04-18
FR2088257B2 (US06272168-20010807-M00014.png) 1973-06-08
FR2088257A2 (US06272168-20010807-M00014.png) 1972-01-07
DE2112229B2 (de) 1977-05-26
NL7004247A (US06272168-20010807-M00014.png) 1971-09-28

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