JPS5320380B2 - - Google Patents

Info

Publication number
JPS5320380B2
JPS5320380B2 JP1940477A JP1940477A JPS5320380B2 JP S5320380 B2 JPS5320380 B2 JP S5320380B2 JP 1940477 A JP1940477 A JP 1940477A JP 1940477 A JP1940477 A JP 1940477A JP S5320380 B2 JPS5320380 B2 JP S5320380B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1940477A
Other versions
JPS52111373A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS52111373A publication Critical patent/JPS52111373A/ja
Publication of JPS5320380B2 publication Critical patent/JPS5320380B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2637—Circuits therefor for testing other individual devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Weting (AREA)
JP1940477A 1976-03-15 1977-02-25 Method of testing electrooactive defects in semiconductor substrates Granted JPS52111373A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US66723276A 1976-03-15 1976-03-15

Publications (2)

Publication Number Publication Date
JPS52111373A JPS52111373A (en) 1977-09-19
JPS5320380B2 true JPS5320380B2 (ja) 1978-06-26

Family

ID=24677379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1940477A Granted JPS52111373A (en) 1976-03-15 1977-02-25 Method of testing electrooactive defects in semiconductor substrates

Country Status (6)

Country Link
JP (1) JPS52111373A (ja)
CA (1) CA1069221A (ja)
DE (1) DE2707372C2 (ja)
FR (1) FR2344847A1 (ja)
GB (1) GB1514697A (ja)
IT (1) IT1118013B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066920A (ja) * 1983-09-22 1985-04-17 北興化工機株式会社 可搬式サイレ−ジ容器

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2532760A1 (fr) * 1982-09-08 1984-03-09 Comp Generale Electricite Procede et dispositif pour obtenir des caracteristiques physiques d'un materiau semi-conducteur
EP0400387B1 (de) * 1989-05-31 1996-02-21 Siemens Aktiengesellschaft Verfahren zum grossflächigen elektrischen Kontaktieren eines Halbleiterkristallkörpers mit Hilfe von Elektrolyten
DE59006874D1 (de) * 1989-05-31 1994-09-29 Siemens Ag Verfahren zur Bestimmung der Rekombinationsgeschwindigkeit von Minoritätsträgern an Grenzflächen zwischen Halbleitern und anderen Substanzen.
DE3917702A1 (de) * 1989-05-31 1990-12-06 Siemens Ag Verfahren zur ortsaufgeloesten bestimmung der diffusionslaenge von minoritaetsladungstraegern in einem halbleiterkristallkoerper mit hilfe einer elektrolytischen zelle
DE4328083A1 (de) * 1993-08-20 1994-03-31 Ignaz Eisele Verfahren zur mikroskopischen Messung von Topographie und lateralen Potentialverteilungen an einer Oberfläche mit einer Feldeffektanordnung
JP4916249B2 (ja) * 2006-08-10 2012-04-11 新電元工業株式会社 半導体基板の検査方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3655540A (en) * 1970-06-22 1972-04-11 Bell Telephone Labor Inc Method of making semiconductor device components
US3902979A (en) * 1974-06-24 1975-09-02 Westinghouse Electric Corp Insulator substrate with a thin mono-crystalline semiconductive layer and method of fabrication

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066920A (ja) * 1983-09-22 1985-04-17 北興化工機株式会社 可搬式サイレ−ジ容器

Also Published As

Publication number Publication date
JPS52111373A (en) 1977-09-19
FR2344847B1 (ja) 1979-09-28
FR2344847A1 (fr) 1977-10-14
DE2707372C2 (de) 1985-08-22
IT1118013B (it) 1986-02-24
DE2707372A1 (de) 1977-09-22
GB1514697A (en) 1978-06-21
CA1069221A (en) 1980-01-01

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