JPS5315776A - Production of junction type field effect transistors - Google Patents

Production of junction type field effect transistors

Info

Publication number
JPS5315776A
JPS5315776A JP9064576A JP9064576A JPS5315776A JP S5315776 A JPS5315776 A JP S5315776A JP 9064576 A JP9064576 A JP 9064576A JP 9064576 A JP9064576 A JP 9064576A JP S5315776 A JPS5315776 A JP S5315776A
Authority
JP
Japan
Prior art keywords
production
field effect
junction type
type field
effect transistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9064576A
Other languages
Japanese (ja)
Inventor
Masahiro Yoshida
Genshiro Nakamura
Yasunari Kajiwara
Yoshinori Yukimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9064576A priority Critical patent/JPS5315776A/en
Publication of JPS5315776A publication Critical patent/JPS5315776A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: In the production of junction type FETs, the process is so arranged as to necessitate only three times of photoetching.
COPYRIGHT: (C)1978,JPO&Japio
JP9064576A 1976-07-28 1976-07-28 Production of junction type field effect transistors Pending JPS5315776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9064576A JPS5315776A (en) 1976-07-28 1976-07-28 Production of junction type field effect transistors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9064576A JPS5315776A (en) 1976-07-28 1976-07-28 Production of junction type field effect transistors

Publications (1)

Publication Number Publication Date
JPS5315776A true JPS5315776A (en) 1978-02-14

Family

ID=14004232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9064576A Pending JPS5315776A (en) 1976-07-28 1976-07-28 Production of junction type field effect transistors

Country Status (1)

Country Link
JP (1) JPS5315776A (en)

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