JPS531398A - Ion implanting chamber - Google Patents

Ion implanting chamber

Info

Publication number
JPS531398A
JPS531398A JP7555776A JP7555776A JPS531398A JP S531398 A JPS531398 A JP S531398A JP 7555776 A JP7555776 A JP 7555776A JP 7555776 A JP7555776 A JP 7555776A JP S531398 A JPS531398 A JP S531398A
Authority
JP
Japan
Prior art keywords
ion implanting
implanting chamber
chamber
speciment
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7555776A
Other languages
Japanese (ja)
Other versions
JPS598026B2 (en
Inventor
Kuniyuki Sakumichi
Katsumi Tokikuchi
Hideki Koike
Ichiro Shikamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7555776A priority Critical patent/JPS598026B2/en
Publication of JPS531398A publication Critical patent/JPS531398A/en
Publication of JPS598026B2 publication Critical patent/JPS598026B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)

Abstract

PURPOSE: To eliminate the cause of pollution of a specimen by inserting the speciment from a pre-processing container directly to a rotary column in a vacuum and by fixing it utilizing a centrifugal force.
COPYRIGHT: (C)1978,JPO&Japio
JP7555776A 1976-06-28 1976-06-28 Ion implantation room Expired JPS598026B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7555776A JPS598026B2 (en) 1976-06-28 1976-06-28 Ion implantation room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7555776A JPS598026B2 (en) 1976-06-28 1976-06-28 Ion implantation room

Publications (2)

Publication Number Publication Date
JPS531398A true JPS531398A (en) 1978-01-09
JPS598026B2 JPS598026B2 (en) 1984-02-22

Family

ID=13579593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7555776A Expired JPS598026B2 (en) 1976-06-28 1976-06-28 Ion implantation room

Country Status (1)

Country Link
JP (1) JPS598026B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60246628A (en) * 1984-05-21 1985-12-06 Mitsubishi Electric Corp Ion-implanting process in semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60246628A (en) * 1984-05-21 1985-12-06 Mitsubishi Electric Corp Ion-implanting process in semiconductor wafer

Also Published As

Publication number Publication date
JPS598026B2 (en) 1984-02-22

Similar Documents

Publication Publication Date Title
JPS5288900A (en) Ion beam machine tool
JPS531398A (en) Ion implanting chamber
JPS5249774A (en) Ion implanting device
JPS5396938A (en) Dry etching apparatus
JPS5241583A (en) Ion detecting device for mass analyzer
JPS52123174A (en) Specimen scanning method for ion implantation
JPS5341982A (en) Wafer holder for ion implantation processing
JPS5219900A (en) Method of processing radioactive waste liquor
JPS5239365A (en) Electronic gun device
JPS5217886A (en) Multikind ion detector
JPS5227956A (en) Rotary device for trnsmitting rotation
JPS5230263A (en) Cold trap device
JPS5221574A (en) Vacuum multiplying force device
JPS5251993A (en) Ion exchange resin column
JPS5376631A (en) Delivery sectioning system
JPS5244229A (en) Method of making serological reagent for syphilis
JPS52104865A (en) X-ray analysis apparatus in electronic microscope or like
JPS53106576A (en) Ion etching device
JPS5420657A (en) Sample processor for scanning electron microscope and its similar device
JPS5381290A (en) Mass analysis of solution sample
JPS5225978A (en) Fly-wheel revolution control method
JPS52150959A (en) Electronic microscope or its similar device
JPS52131466A (en) Plasma etching method
JPS51137368A (en) Movable iris for electron microscope
JPS5258169A (en) Impinging type separator