JPS53136971A - Semiconductor wafer and device for positioning electron beam at desired position with respect to said wafer - Google Patents

Semiconductor wafer and device for positioning electron beam at desired position with respect to said wafer

Info

Publication number
JPS53136971A
JPS53136971A JP5902178A JP5902178A JPS53136971A JP S53136971 A JPS53136971 A JP S53136971A JP 5902178 A JP5902178 A JP 5902178A JP 5902178 A JP5902178 A JP 5902178A JP S53136971 A JPS53136971 A JP S53136971A
Authority
JP
Japan
Prior art keywords
wafer
respect
electron beam
desired position
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5902178A
Other languages
English (en)
Other versions
JPS545267B2 (ja
Inventor
Kei Hatsusan Jiyabuasuu
Buii Rabusuteineku Kaaru
Deii Utoka Ansonii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS53136971A publication Critical patent/JPS53136971A/ja
Publication of JPS545267B2 publication Critical patent/JPS545267B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/39—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using a combination of the means covered by at least two of the preceding groups G05B19/21, G05B19/27 and G05B19/33
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/34—Director, elements to supervisory
    • G05B2219/34388—Detect correct moment, position, advanced, delayed, then next command
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41457—Superposition of movement
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42249—Relative positioning
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42251—Control position of beam in coordination with xy slide

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
  • Automatic Control Of Machine Tools (AREA)
  • Numerical Control (AREA)
JP5902178A 1973-09-10 1978-05-19 Semiconductor wafer and device for positioning electron beam at desired position with respect to said wafer Granted JPS53136971A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US395502A US3886421A (en) 1973-09-10 1973-09-10 Precision tool and workpiece positioning apparatus with ringout detection

Publications (2)

Publication Number Publication Date
JPS53136971A true JPS53136971A (en) 1978-11-29
JPS545267B2 JPS545267B2 (ja) 1979-03-15

Family

ID=23563317

Family Applications (2)

Application Number Title Priority Date Filing Date
JP8991774A Expired JPS5517965B2 (ja) 1973-09-10 1974-08-07
JP5902178A Granted JPS53136971A (en) 1973-09-10 1978-05-19 Semiconductor wafer and device for positioning electron beam at desired position with respect to said wafer

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP8991774A Expired JPS5517965B2 (ja) 1973-09-10 1974-08-07

Country Status (4)

Country Link
US (1) US3886421A (ja)
JP (2) JPS5517965B2 (ja)
CA (1) CA1032635A (ja)
NL (1) NL7411712A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01216530A (ja) * 1988-02-25 1989-08-30 Jeol Ltd 描画装置用移動ステージ

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53110381A (en) * 1977-03-08 1978-09-27 Nippon Telegr & Teleph Corp <Ntt> Position control device for electron beam exposure unit
JPS5518031A (en) * 1978-07-25 1980-02-07 Jeol Ltd Stage shifting device in electron beam device
JPS5517399U (ja) * 1979-08-13 1980-02-04
DE3039400C2 (de) * 1980-10-18 1984-10-04 Ludwig Dr.-Ing. 7500 Karlsruhe Pietzsch Verfahren zum Steuern von Handhabungssystemen und Handhabungssystem zur Durchführung dieses Verfahrens
JPS61287675A (ja) * 1985-06-12 1986-12-18 株式会社日立製作所 エレベ−タの位置検出装置
US6320345B1 (en) 1998-03-05 2001-11-20 Nikon Corporation Command trajectory for driving a stage with minimal vibration
US6008610A (en) * 1998-03-20 1999-12-28 Nikon Corporation Position control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning system
US6260282B1 (en) 1998-03-27 2001-07-17 Nikon Corporation Stage control with reduced synchronization error and settling time
US6835912B2 (en) * 2002-05-28 2004-12-28 Trumpf, Inc. Laser cutting machine with two Y-axis drives
US20050103764A1 (en) * 2003-10-01 2005-05-19 Trumpf, Inc. Laser cutting machine with two X-axis drives
JP2005203567A (ja) * 2004-01-15 2005-07-28 Canon Inc 駆動装置、露光装置及びデバイス製造方法
US20090192644A1 (en) * 2008-01-30 2009-07-30 Meyer Thomas J Method and system for manufacturing an article using portable hand-held tools
TWI410295B (zh) * 2010-05-27 2013-10-01 Univ Nat Formosa Two - degree - of - freedom nano - level piezoelectric alignment platform mechanism
EP3060513B1 (en) 2013-10-25 2017-07-05 Transformix Engineering Inc. Flexible feeding and closing machine for hinged caps
CA2995268C (en) * 2014-08-12 2022-05-10 Transformix Engineering Inc. Computer numerical control assembly or processing of components

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB816360A (en) * 1956-07-06 1959-07-08 Acec Electric remote-control positioning system
JPS4734960U (ja) * 1971-05-14 1972-12-19

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2674708A (en) * 1951-10-29 1954-04-06 Honeywell Regulator Co Damping arrangement for electric motor follow-up systems
US3142018A (en) * 1961-01-24 1964-07-21 Seneca Falls Machine Co Fine and coarse positional servo system
US3323030A (en) * 1963-12-23 1967-05-30 Fujitsu Ltd Digital fine and coarse servo motor control system
CH436751A (de) * 1966-05-31 1967-05-31 Contraves Ag Koordinatograph
DE1804646B2 (de) * 1968-10-18 1973-03-22 Siemens AG, 1000 Berlin u. 8000 München Korpuskularstrahl-bearbeitungsgeraet
US3733484A (en) * 1969-10-29 1973-05-15 Walter C Mc Crone Associates I Control for electron microprobe
FR2098524A5 (ja) * 1970-07-17 1972-03-10 Thomson Csf

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB816360A (en) * 1956-07-06 1959-07-08 Acec Electric remote-control positioning system
JPS4734960U (ja) * 1971-05-14 1972-12-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01216530A (ja) * 1988-02-25 1989-08-30 Jeol Ltd 描画装置用移動ステージ

Also Published As

Publication number Publication date
CA1032635A (en) 1978-06-06
US3886421A (en) 1975-05-27
NL7411712A (nl) 1975-03-12
JPS545267B2 (ja) 1979-03-15
JPS5054782A (ja) 1975-05-14
JPS5517965B2 (ja) 1980-05-15

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