JPS53136859A - Contact arrangement for contineous flow type measurement of play*gap or feed - Google Patents

Contact arrangement for contineous flow type measurement of play*gap or feed

Info

Publication number
JPS53136859A
JPS53136859A JP4339078A JP4339078A JPS53136859A JP S53136859 A JPS53136859 A JP S53136859A JP 4339078 A JP4339078 A JP 4339078A JP 4339078 A JP4339078 A JP 4339078A JP S53136859 A JPS53136859 A JP S53136859A
Authority
JP
Japan
Prior art keywords
contineous
play
feed
gap
flow type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4339078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138402B2 (OSRAM
Inventor
Iichiya Yan
Kopetsueeku Kareru
Ranjieru Bureteisurafu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Prvni Brnenska Strojirna Zavody Klementa Gottwalda
Original Assignee
Prvni Brnenska Strojirna Zavody Klementa Gottwalda
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Prvni Brnenska Strojirna Zavody Klementa Gottwalda filed Critical Prvni Brnenska Strojirna Zavody Klementa Gottwalda
Publication of JPS53136859A publication Critical patent/JPS53136859A/ja
Publication of JPS6138402B2 publication Critical patent/JPS6138402B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D21/00—Shutting-down of machines or engines, e.g. in emergency; Regulating, controlling, or safety means not otherwise provided for
    • F01D21/04—Shutting-down of machines or engines, e.g. in emergency; Regulating, controlling, or safety means not otherwise provided for responsive to undesired position of rotor relative to stator or to breaking-off of a part of the rotor, e.g. indicating such position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/12—Measuring arrangements characterised by the use of fluids for measuring distance or clearance between spaced objects or spaced apertures
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/30—Structural association with control circuits or drive circuits
    • H02K11/35—Devices for recording or transmitting machine parameters, e.g. memory chips or radio transmitters for diagnosis

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Arrangements Characterized By The Use Of Fluids (AREA)
  • Measuring Fluid Pressure (AREA)
  • Testing Of Balance (AREA)
JP4339078A 1977-04-16 1978-04-14 Contact arrangement for contineous flow type measurement of play*gap or feed Granted JPS53136859A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS772513A CS193219B1 (en) 1977-04-16 1977-04-16 Connection for continuous measuring of the clearance,gaps and shifts

Publications (2)

Publication Number Publication Date
JPS53136859A true JPS53136859A (en) 1978-11-29
JPS6138402B2 JPS6138402B2 (OSRAM) 1986-08-29

Family

ID=5362500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4339078A Granted JPS53136859A (en) 1977-04-16 1978-04-14 Contact arrangement for contineous flow type measurement of play*gap or feed

Country Status (7)

Country Link
US (1) US4159636A (OSRAM)
JP (1) JPS53136859A (OSRAM)
CH (1) CH624211A5 (OSRAM)
CS (1) CS193219B1 (OSRAM)
DE (1) DE2807881C2 (OSRAM)
FR (1) FR2387435A1 (OSRAM)
GB (1) GB1598205A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032687A (ja) * 2006-06-27 2008-02-14 Nippon Pneumatics Fluidics System Co Ltd 位置確認装置
JP2019507894A (ja) * 2015-12-21 2019-03-22 エーエスエムエル ネザーランズ ビー．ブイ． 高さ測定装置、リソグラフィ装置、高さ測定方法、および高さ測定装置を製造する方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4715213A (en) * 1986-03-13 1987-12-29 General Electric Company Flow measurement system
US5213726A (en) * 1987-10-14 1993-05-25 Matrix Technologies, Inc. Molding and gauging method
US5244372A (en) * 1987-10-14 1993-09-14 Matrix Technologies, Inc. Molding and gauging system
DE4134589C2 (de) * 1991-10-19 1995-01-05 Neuman & Esser Maschf Verfahren zur Diagnose des Verschleisses von Maschinenteilen
DE4233326C2 (de) * 1992-10-05 2001-06-28 Schenck Rotec Gmbh Überwachungsvorrichtung für eine Auswuchtmaschine
DE10155135B4 (de) * 2001-10-12 2006-04-27 Ifm Electronic Gmbh Meßeinrichtung zur Bestimmung der Position eines Objektes relativ zu einer Bezugsfläche
US6853945B2 (en) * 2003-03-27 2005-02-08 General Electric Company Method of on-line monitoring of radial clearances in steam turbines
EP1505262A1 (de) * 2003-08-08 2005-02-09 Siemens Aktiengesellschaft Verfahren und Vorrichtung zur Messung der Breite eines Radialspaltes
US7808233B2 (en) * 2006-06-19 2010-10-05 General Electric Company Methods and apparatus for monitoring rotary machines
US7656135B2 (en) * 2007-01-05 2010-02-02 General Electric Company Method and apparatus for controlling rotary machines
US7847442B2 (en) 2008-04-22 2010-12-07 Nti Ag Linear motor
NL2016877A (en) 2015-06-18 2016-12-22 Asml Holding Nv An apparatus including a gas gauge and method of operating the same

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE385512A (OSRAM) * 1932-01-08
BE493683A (OSRAM) * 1949-02-22
NL73735C (OSRAM) * 1949-06-30
NL80814C (OSRAM) * 1950-02-04
DE1160652B (de) * 1960-06-01 1964-01-02 Maschf Augsburg Nuernberg Ag Einrichtung zum Messen der gegenseitigen axialen Verschiebung zweier Turbinenteile
US3754433A (en) * 1971-09-17 1973-08-28 Bendix Corp Fluidic proximity sensor
DE2507516C3 (de) * 1975-02-21 1979-10-25 Prvni Brnenska Strojirna N.P., Bruenn (Tschechoslowakei) Anordnung zum Messen von Spaltweiten, insbesondere Radialspielen, in Dampfturbinen u.a. Maschinen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008032687A (ja) * 2006-06-27 2008-02-14 Nippon Pneumatics Fluidics System Co Ltd 位置確認装置
JP2019507894A (ja) * 2015-12-21 2019-03-22 エーエスエムエル ネザーランズ ビー．ブイ． 高さ測定装置、リソグラフィ装置、高さ測定方法、および高さ測定装置を製造する方法

Also Published As

Publication number Publication date
CS193219B1 (en) 1979-10-31
DE2807881C2 (de) 1986-04-17
FR2387435A1 (fr) 1978-11-10
DE2807881A1 (de) 1978-10-19
GB1598205A (en) 1981-09-16
FR2387435B1 (OSRAM) 1983-04-01
CH624211A5 (OSRAM) 1981-07-15
US4159636A (en) 1979-07-03
JPS6138402B2 (OSRAM) 1986-08-29

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