JPS5313354A - Heat treatment unit of semiconductor element - Google Patents
Heat treatment unit of semiconductor elementInfo
- Publication number
- JPS5313354A JPS5313354A JP8749476A JP8749476A JPS5313354A JP S5313354 A JPS5313354 A JP S5313354A JP 8749476 A JP8749476 A JP 8749476A JP 8749476 A JP8749476 A JP 8749476A JP S5313354 A JPS5313354 A JP S5313354A
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- semiconductor element
- treatment unit
- value
- fe2o3
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:The value of Fe component in SiC in a heat averaging tube is kept below the Fe2O3-converted value of 0.1%, thereby preventing the contamination due to copper in wafer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8749476A JPS5313354A (en) | 1976-07-22 | 1976-07-22 | Heat treatment unit of semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8749476A JPS5313354A (en) | 1976-07-22 | 1976-07-22 | Heat treatment unit of semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5313354A true JPS5313354A (en) | 1978-02-06 |
Family
ID=13916503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8749476A Pending JPS5313354A (en) | 1976-07-22 | 1976-07-22 | Heat treatment unit of semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5313354A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6123316A (en) * | 1984-07-11 | 1986-01-31 | Toshiba Ceramics Co Ltd | Structural material for semiconductor heat-treatment furnace |
JPS61288417A (en) * | 1985-06-17 | 1986-12-18 | Toshiba Ceramics Co Ltd | Heating furnace for manufacture of semiconductor |
JPS6374223U (en) * | 1986-10-31 | 1988-05-18 |
-
1976
- 1976-07-22 JP JP8749476A patent/JPS5313354A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6123316A (en) * | 1984-07-11 | 1986-01-31 | Toshiba Ceramics Co Ltd | Structural material for semiconductor heat-treatment furnace |
JPS61288417A (en) * | 1985-06-17 | 1986-12-18 | Toshiba Ceramics Co Ltd | Heating furnace for manufacture of semiconductor |
JPS6374223U (en) * | 1986-10-31 | 1988-05-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
LAPS | Cancellation because of no payment of annual fees |