JPS5313354A - Heat treatment unit of semiconductor element - Google Patents

Heat treatment unit of semiconductor element

Info

Publication number
JPS5313354A
JPS5313354A JP8749476A JP8749476A JPS5313354A JP S5313354 A JPS5313354 A JP S5313354A JP 8749476 A JP8749476 A JP 8749476A JP 8749476 A JP8749476 A JP 8749476A JP S5313354 A JPS5313354 A JP S5313354A
Authority
JP
Japan
Prior art keywords
heat treatment
semiconductor element
treatment unit
value
fe2o3
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8749476A
Other languages
Japanese (ja)
Inventor
Koichiro Kishikawa
Tsukasa Hattori
Michio Ichikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8749476A priority Critical patent/JPS5313354A/en
Publication of JPS5313354A publication Critical patent/JPS5313354A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:The value of Fe component in SiC in a heat averaging tube is kept below the Fe2O3-converted value of 0.1%, thereby preventing the contamination due to copper in wafer.
JP8749476A 1976-07-22 1976-07-22 Heat treatment unit of semiconductor element Pending JPS5313354A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8749476A JPS5313354A (en) 1976-07-22 1976-07-22 Heat treatment unit of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8749476A JPS5313354A (en) 1976-07-22 1976-07-22 Heat treatment unit of semiconductor element

Publications (1)

Publication Number Publication Date
JPS5313354A true JPS5313354A (en) 1978-02-06

Family

ID=13916503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8749476A Pending JPS5313354A (en) 1976-07-22 1976-07-22 Heat treatment unit of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5313354A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6123316A (en) * 1984-07-11 1986-01-31 Toshiba Ceramics Co Ltd Structural material for semiconductor heat-treatment furnace
JPS61288417A (en) * 1985-06-17 1986-12-18 Toshiba Ceramics Co Ltd Heating furnace for manufacture of semiconductor
JPS6374223U (en) * 1986-10-31 1988-05-18

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6123316A (en) * 1984-07-11 1986-01-31 Toshiba Ceramics Co Ltd Structural material for semiconductor heat-treatment furnace
JPS61288417A (en) * 1985-06-17 1986-12-18 Toshiba Ceramics Co Ltd Heating furnace for manufacture of semiconductor
JPS6374223U (en) * 1986-10-31 1988-05-18

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Legal Events

Date Code Title Description
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LAPS Cancellation because of no payment of annual fees