JPS53123661A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS53123661A
JPS53123661A JP3876377A JP3876377A JPS53123661A JP S53123661 A JPS53123661 A JP S53123661A JP 3876377 A JP3876377 A JP 3876377A JP 3876377 A JP3876377 A JP 3876377A JP S53123661 A JPS53123661 A JP S53123661A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
formation
insulating film
opening part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3876377A
Other languages
Japanese (ja)
Inventor
Shinobu Fukunaga
Masahiko Yasuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3876377A priority Critical patent/JPS53123661A/en
Priority to US05/892,861 priority patent/US4217153A/en
Publication of JPS53123661A publication Critical patent/JPS53123661A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To realize the formation of a fine opening part as well as to make gentle the grade of a insulating film edge facing the opening part, by applying the selective oxidazation technic for the formation of an opening on the insulating film coated in a semiconductor region.
COPYRIGHT: (C)1978,JPO&Japio
JP3876377A 1977-04-04 1977-04-04 Manufacture of semiconductor device Pending JPS53123661A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3876377A JPS53123661A (en) 1977-04-04 1977-04-04 Manufacture of semiconductor device
US05/892,861 US4217153A (en) 1977-04-04 1978-03-31 Method of manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3876377A JPS53123661A (en) 1977-04-04 1977-04-04 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53123661A true JPS53123661A (en) 1978-10-28

Family

ID=12534312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3876377A Pending JPS53123661A (en) 1977-04-04 1977-04-04 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53123661A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141758A (en) * 1979-04-23 1980-11-05 Philips Nv Method of fabricating insulated gate field effect transistor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141758A (en) * 1979-04-23 1980-11-05 Philips Nv Method of fabricating insulated gate field effect transistor

Similar Documents

Publication Publication Date Title
JPS5345971A (en) Semiconductor device
JPS53123661A (en) Manufacture of semiconductor device
JPS5228868A (en) Semiconductor device
JPS5441671A (en) Semiconductor device
JPS538072A (en) Semiconductor device
JPS5357773A (en) Semiconductor device
JPS52153383A (en) Preparation of semiconductor device
JPS5348458A (en) Production of semiconductor device
JPS52130567A (en) Preparation of semiconductor device
JPS5267271A (en) Formation of through-hole onto semiconductor substrate
JPS5424574A (en) Manufacture for semiconductor device
JPS547867A (en) Manufacture for semiconductor device
JPS547879A (en) Manufacture for semiconductor device
JPS5432269A (en) Manufacture for semiconductor device
JPS5315759A (en) Electronic parts
JPS546773A (en) Manufacture of semiconductor device
JPS5349972A (en) Manufacture of semiconductor device
JPS5373979A (en) Transistor device
JPS535580A (en) Field effect type semiconductor device
JPS5231691A (en) Semiconductor luminous device
JPS5390770A (en) Production of semiconductor device
JPS5380976A (en) Semiconductor device
JPS53117983A (en) Production of semiconductor device
JPS52119862A (en) Semi-conductor device and its manufacture
JPS5384691A (en) Production of semiconductor device