JPS5312278A - Production of mos type semiconductor device - Google Patents

Production of mos type semiconductor device

Info

Publication number
JPS5312278A
JPS5312278A JP8669176A JP8669176A JPS5312278A JP S5312278 A JPS5312278 A JP S5312278A JP 8669176 A JP8669176 A JP 8669176A JP 8669176 A JP8669176 A JP 8669176A JP S5312278 A JPS5312278 A JP S5312278A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
type semiconductor
mos type
make possible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8669176A
Other languages
English (en)
Other versions
JPS6051277B2 (ja
Inventor
Kenzo Hatada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8669176A priority Critical patent/JPS6051277B2/ja
Publication of JPS5312278A publication Critical patent/JPS5312278A/ja
Publication of JPS6051277B2 publication Critical patent/JPS6051277B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
JP8669176A 1976-07-20 1976-07-20 Ｍｏｓ型半導体装置の製造方法 Expired JPS6051277B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8669176A JPS6051277B2 (ja) 1976-07-20 1976-07-20 Ｍｏｓ型半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8669176A JPS6051277B2 (ja) 1976-07-20 1976-07-20 Ｍｏｓ型半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5312278A true JPS5312278A (en) 1978-02-03
JPS6051277B2 JPS6051277B2 (ja) 1985-11-13

Family

ID=13893984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8669176A Expired JPS6051277B2 (ja) 1976-07-20 1976-07-20 Ｍｏｓ型半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6051277B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5546676U (ja) * 1978-09-22 1980-03-27
JPS6112031A (ja) * 1984-06-27 1986-01-20 Nippon Telegr & Teleph Corp <Ntt> 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5546676U (ja) * 1978-09-22 1980-03-27
JPS6112031A (ja) * 1984-06-27 1986-01-20 Nippon Telegr & Teleph Corp <Ntt> 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6051277B2 (ja) 1985-11-13

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