JPS53122380A - Manufacture of semiconductor logic circuit device electrostatic induction type - Google Patents

Manufacture of semiconductor logic circuit device electrostatic induction type

Info

Publication number
JPS53122380A
JPS53122380A JP3739077A JP3739077A JPS53122380A JP S53122380 A JPS53122380 A JP S53122380A JP 3739077 A JP3739077 A JP 3739077A JP 3739077 A JP3739077 A JP 3739077A JP S53122380 A JPS53122380 A JP S53122380A
Authority
JP
Japan
Prior art keywords
manufacture
logic circuit
circuit device
induction type
electrostatic induction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3739077A
Other languages
Japanese (ja)
Other versions
JPS5619738B2 (en
Inventor
Yasutaka Horiba
Takao Nakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3739077A priority Critical patent/JPS53122380A/en
Publication of JPS53122380A publication Critical patent/JPS53122380A/en
Publication of JPS5619738B2 publication Critical patent/JPS5619738B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0214—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L
    • H01L27/0218—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L of field effect structures
    • H01L27/0225—Charge injection in static induction transistor logic structures [SITL]

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Bipolar Transistors (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Logic Circuits (AREA)

Abstract

PURPOSE:To increase the interlinking performance, by placing a clear boundary between the cahnnel domain ahving a short channel length and high specific resistivity and the channel, and by reducing the conductive resistance of FET constituting the circuit as the gate construction having a large effective channel diameter.
JP3739077A 1977-03-31 1977-03-31 Manufacture of semiconductor logic circuit device electrostatic induction type Granted JPS53122380A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3739077A JPS53122380A (en) 1977-03-31 1977-03-31 Manufacture of semiconductor logic circuit device electrostatic induction type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3739077A JPS53122380A (en) 1977-03-31 1977-03-31 Manufacture of semiconductor logic circuit device electrostatic induction type

Publications (2)

Publication Number Publication Date
JPS53122380A true JPS53122380A (en) 1978-10-25
JPS5619738B2 JPS5619738B2 (en) 1981-05-09

Family

ID=12496192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3739077A Granted JPS53122380A (en) 1977-03-31 1977-03-31 Manufacture of semiconductor logic circuit device electrostatic induction type

Country Status (1)

Country Link
JP (1) JPS53122380A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58101399A (en) * 1981-12-14 1983-06-16 株式会社東芝 Fluid equipment monitor

Also Published As

Publication number Publication date
JPS5619738B2 (en) 1981-05-09

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