JPS53122383A - Manufacture for semiconuctor logic circuit device of electrostatic induction type - Google Patents

Manufacture for semiconuctor logic circuit device of electrostatic induction type

Info

Publication number
JPS53122383A
JPS53122383A JP3740577A JP3740577A JPS53122383A JP S53122383 A JPS53122383 A JP S53122383A JP 3740577 A JP3740577 A JP 3740577A JP 3740577 A JP3740577 A JP 3740577A JP S53122383 A JPS53122383 A JP S53122383A
Authority
JP
Japan
Prior art keywords
semiconuctor
manufacture
logic circuit
circuit device
induction type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3740577A
Other languages
Japanese (ja)
Inventor
Saburo Osaki
Tadashi Hirao
Koichi Kijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3740577A priority Critical patent/JPS53122383A/en
Publication of JPS53122383A publication Critical patent/JPS53122383A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0214—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L
    • H01L27/0218—Particular design considerations for integrated circuits for internal polarisation, e.g. I2L of field effect structures
    • H01L27/0225—Charge injection in static induction transistor logic structures [SITL]

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Logic Circuits (AREA)

Abstract

PURPOSE:To reduce the capacitance between the source and the gate, to increase the degree of integration, and also to increase the high frequency performance, by reducing the capacitance between the drain and the gate through the provision of the insulating film in contact with a part of the side surface of the drain domain, and by utilizing the insulating film as the current pinch off between the source and the drain.
JP3740577A 1977-03-31 1977-03-31 Manufacture for semiconuctor logic circuit device of electrostatic induction type Pending JPS53122383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3740577A JPS53122383A (en) 1977-03-31 1977-03-31 Manufacture for semiconuctor logic circuit device of electrostatic induction type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3740577A JPS53122383A (en) 1977-03-31 1977-03-31 Manufacture for semiconuctor logic circuit device of electrostatic induction type

Publications (1)

Publication Number Publication Date
JPS53122383A true JPS53122383A (en) 1978-10-25

Family

ID=12496608

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3740577A Pending JPS53122383A (en) 1977-03-31 1977-03-31 Manufacture for semiconuctor logic circuit device of electrostatic induction type

Country Status (1)

Country Link
JP (1) JPS53122383A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5529122A (en) * 1978-08-23 1980-03-01 Hitachi Ltd Semiconductor device
JPS5529124A (en) * 1978-08-23 1980-03-01 Hitachi Ltd Semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5529122A (en) * 1978-08-23 1980-03-01 Hitachi Ltd Semiconductor device
JPS5529124A (en) * 1978-08-23 1980-03-01 Hitachi Ltd Semiconductor device

Similar Documents

Publication Publication Date Title
JPS53122383A (en) Manufacture for semiconuctor logic circuit device of electrostatic induction type
JPS51150284A (en) Semiconductor unvolatile memory unit
JPS5384570A (en) Field effect semiconductor device and its manufacture
JPS52116831A (en) Transistor invertor
JPS5360582A (en) Semiconductor ingegrated circuit device
JPS5219083A (en) Field-effect tansistor
JPS5346288A (en) Mis type semiconductor device
JPS5279667A (en) Semiconductor device
JPS53122382A (en) Semiconductor logic circuit device of electrostatic induction type
JPS53122384A (en) Manufacture for electrostatic induction transistor logic
JPS53122378A (en) Semiconductor logic circuit device of electrostatic induction type
JPS53122381A (en) Semiconductor logic circuit device of electrostatic induction type
JPS534446A (en) Waveguide type field effect transistor
JPS5376675A (en) High breakdown voltage field effect power transistor
JPS5363985A (en) Semiconductor device
JPS5421285A (en) Transistor
JPS5296874A (en) Manufacture of electric charge coupling type semiconductor device
JPS53122380A (en) Manufacture of semiconductor logic circuit device electrostatic induction type
JPS53110480A (en) Insulated gate type semiconductor device of complementary circuit
JPS5381085A (en) Production of semiconductor device
JPS5242078A (en) Insulated gate tupe field effect transistor
JPS5340291A (en) Manufacture of semiconductor device
JPS52147983A (en) Insulation gate type semiconductor device
JPS53121583A (en) Manufacture of semiconductor device
JPS5378179A (en) Inverter circuit using field effect element