JPS53120466A - Measurement of surface roughness - Google Patents
Measurement of surface roughnessInfo
- Publication number
- JPS53120466A JPS53120466A JP3578977A JP3578977A JPS53120466A JP S53120466 A JPS53120466 A JP S53120466A JP 3578977 A JP3578977 A JP 3578977A JP 3578977 A JP3578977 A JP 3578977A JP S53120466 A JPS53120466 A JP S53120466A
- Authority
- JP
- Japan
- Prior art keywords
- surface roughness
- interference
- measurement
- opti
- discrepancies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To measure the surface roughness highly accurately, simply and promptly by converting the interference drawing, which is obtained byusing an opti al interference microscope, into a TV image so as to compare the discrepancies between the electric signals corresponding to the interference drawings of two different portions.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3578977A JPS53120466A (en) | 1977-03-29 | 1977-03-29 | Measurement of surface roughness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3578977A JPS53120466A (en) | 1977-03-29 | 1977-03-29 | Measurement of surface roughness |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53120466A true JPS53120466A (en) | 1978-10-20 |
Family
ID=12451669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3578977A Pending JPS53120466A (en) | 1977-03-29 | 1977-03-29 | Measurement of surface roughness |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53120466A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008018133A (en) * | 2006-07-14 | 2008-01-31 | Matsushita Electric Ind Co Ltd | Vacuum cleaner |
-
1977
- 1977-03-29 JP JP3578977A patent/JPS53120466A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008018133A (en) * | 2006-07-14 | 2008-01-31 | Matsushita Electric Ind Co Ltd | Vacuum cleaner |
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