JPS53120466A - Measurement of surface roughness - Google Patents

Measurement of surface roughness

Info

Publication number
JPS53120466A
JPS53120466A JP3578977A JP3578977A JPS53120466A JP S53120466 A JPS53120466 A JP S53120466A JP 3578977 A JP3578977 A JP 3578977A JP 3578977 A JP3578977 A JP 3578977A JP S53120466 A JPS53120466 A JP S53120466A
Authority
JP
Japan
Prior art keywords
surface roughness
interference
measurement
opti
discrepancies
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3578977A
Other languages
Japanese (ja)
Inventor
Katsumi Suzuki
Katsumi Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3578977A priority Critical patent/JPS53120466A/en
Publication of JPS53120466A publication Critical patent/JPS53120466A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To measure the surface roughness highly accurately, simply and promptly by converting the interference drawing, which is obtained byusing an opti al interference microscope, into a TV image so as to compare the discrepancies between the electric signals corresponding to the interference drawings of two different portions.
COPYRIGHT: (C)1978,JPO&Japio
JP3578977A 1977-03-29 1977-03-29 Measurement of surface roughness Pending JPS53120466A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3578977A JPS53120466A (en) 1977-03-29 1977-03-29 Measurement of surface roughness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3578977A JPS53120466A (en) 1977-03-29 1977-03-29 Measurement of surface roughness

Publications (1)

Publication Number Publication Date
JPS53120466A true JPS53120466A (en) 1978-10-20

Family

ID=12451669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3578977A Pending JPS53120466A (en) 1977-03-29 1977-03-29 Measurement of surface roughness

Country Status (1)

Country Link
JP (1) JPS53120466A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008018133A (en) * 2006-07-14 2008-01-31 Matsushita Electric Ind Co Ltd Vacuum cleaner

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008018133A (en) * 2006-07-14 2008-01-31 Matsushita Electric Ind Co Ltd Vacuum cleaner

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