JPS53116775A - Vapor phase growth apparatus of semiconductor crystals - Google Patents

Vapor phase growth apparatus of semiconductor crystals

Info

Publication number
JPS53116775A
JPS53116775A JP3193177A JP3193177A JPS53116775A JP S53116775 A JPS53116775 A JP S53116775A JP 3193177 A JP3193177 A JP 3193177A JP 3193177 A JP3193177 A JP 3193177A JP S53116775 A JPS53116775 A JP S53116775A
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
growth apparatus
semiconductor crystals
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3193177A
Other languages
English (en)
Inventor
Michihiro Ito
Takeshi Suzuki
Mikio Nishihata
Hidejiro Miki
Hironobu Hatakeyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3193177A priority Critical patent/JPS53116775A/ja
Publication of JPS53116775A publication Critical patent/JPS53116775A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP3193177A 1977-03-22 1977-03-22 Vapor phase growth apparatus of semiconductor crystals Pending JPS53116775A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3193177A JPS53116775A (en) 1977-03-22 1977-03-22 Vapor phase growth apparatus of semiconductor crystals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3193177A JPS53116775A (en) 1977-03-22 1977-03-22 Vapor phase growth apparatus of semiconductor crystals

Publications (1)

Publication Number Publication Date
JPS53116775A true JPS53116775A (en) 1978-10-12

Family

ID=12344707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3193177A Pending JPS53116775A (en) 1977-03-22 1977-03-22 Vapor phase growth apparatus of semiconductor crystals

Country Status (1)

Country Link
JP (1) JPS53116775A (ja)

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