JPS53113782A - Forming apparatus for film deposited evaporation having no pin hole - Google Patents

Forming apparatus for film deposited evaporation having no pin hole

Info

Publication number
JPS53113782A
JPS53113782A JP2807577A JP2807577A JPS53113782A JP S53113782 A JPS53113782 A JP S53113782A JP 2807577 A JP2807577 A JP 2807577A JP 2807577 A JP2807577 A JP 2807577A JP S53113782 A JPS53113782 A JP S53113782A
Authority
JP
Japan
Prior art keywords
pin hole
film deposited
forming apparatus
evaporation
vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2807577A
Other languages
Japanese (ja)
Other versions
JPS5548108B2 (en
Inventor
Chikara Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2807577A priority Critical patent/JPS53113782A/en
Publication of JPS53113782A publication Critical patent/JPS53113782A/en
Publication of JPS5548108B2 publication Critical patent/JPS5548108B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To form film deposited by evaporation and having no pin hole by equipping a vacuum vessel with an airtight magnetic lifting mechanism and an airtight magnetic combining and driving mechanism, and by making substrate-holding mechanism movable without touch with any other material contained in the vessel or with the wall of the vessel.
JP2807577A 1977-03-16 1977-03-16 Forming apparatus for film deposited evaporation having no pin hole Granted JPS53113782A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2807577A JPS53113782A (en) 1977-03-16 1977-03-16 Forming apparatus for film deposited evaporation having no pin hole

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2807577A JPS53113782A (en) 1977-03-16 1977-03-16 Forming apparatus for film deposited evaporation having no pin hole

Publications (2)

Publication Number Publication Date
JPS53113782A true JPS53113782A (en) 1978-10-04
JPS5548108B2 JPS5548108B2 (en) 1980-12-04

Family

ID=12238643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2807577A Granted JPS53113782A (en) 1977-03-16 1977-03-16 Forming apparatus for film deposited evaporation having no pin hole

Country Status (1)

Country Link
JP (1) JPS53113782A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4940447B2 (en) * 2006-12-29 2012-05-30 クックヒョン シム， Heating device for effectively transferring heat to perm rods and perm rods
JP2013016491A (en) * 2011-07-04 2013-01-24 Samsung Display Co Ltd Organic layer deposition apparatus and method for manufacturing organic light-emitting display device using the same
CN104451585A (en) * 2013-09-12 2015-03-25 三星显示有限公司 Deposition source transporting apparatus
US9624580B2 (en) 2009-09-01 2017-04-18 Samsung Display Co., Ltd. Thin film deposition apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6068541A (en) * 1983-09-21 1985-04-19 Toyota Central Res & Dev Lab Inc Method of photographing false images

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4940447B2 (en) * 2006-12-29 2012-05-30 クックヒョン シム， Heating device for effectively transferring heat to perm rods and perm rods
US9624580B2 (en) 2009-09-01 2017-04-18 Samsung Display Co., Ltd. Thin film deposition apparatus
JP2013016491A (en) * 2011-07-04 2013-01-24 Samsung Display Co Ltd Organic layer deposition apparatus and method for manufacturing organic light-emitting display device using the same
US9777364B2 (en) 2011-07-04 2017-10-03 Samsung Display Co., Ltd. Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
CN104451585A (en) * 2013-09-12 2015-03-25 三星显示有限公司 Deposition source transporting apparatus

Also Published As

Publication number Publication date
JPS5548108B2 (en) 1980-12-04

Similar Documents

Publication Publication Date Title
GB915731A (en) A device for producing drawings and the like
JPS5345865A (en) Micromanipulator
JPS5330889A (en) Driving device of thin film el display device
JPS53113782A (en) Forming apparatus for film deposited evaporation having no pin hole
JPS5267353A (en) Electrostatic chuck
JPS5247185A (en) Speed controller of travelling liquid actuator
JPS53125769A (en) Sputter etching method and container used for it
JPS5412990A (en) Method of carrying article into box-like vessel
JPS5313273A (en) Straight moving plate
JPS5237365A (en) Arm mechanism for industrial robot
JPS5391083A (en) Sputtering apparatus
JPS54107884A (en) Vacuum depositing method for silicon
JPS51130192A (en) The process of manufacture for illminative optical solid display sabst ace
JPS537584A (en) Sputtering apparatus
JPS52149274A (en) Process for forming vacuum evaporation film
JPS51148681A (en) A substrate member moving jig for film formation
JPS5210866A (en) Process for production of compound thin film
JPS549958A (en) Production for spacing defining film of liquid crystal diaply panels
JPS5243074A (en) Vacuum force multipling apparatus
JPS5437038A (en) Production of electro-chemical-molded articles and substrate for electro- chemical molding
JPS5266450A (en) Formation of thin film
JPS5323607A (en) Production of magnetic recording med ia
JPS51140889A (en) A vapor phase growth apparatus
JPS5274579A (en) Formation of evaporation thin film
JPS5392391A (en) Continuous evaporating apparatus