JPS5311037A - Thin film thermal head - Google Patents

Thin film thermal head

Info

Publication number
JPS5311037A
JPS5311037A JP8500876A JP8500876A JPS5311037A JP S5311037 A JPS5311037 A JP S5311037A JP 8500876 A JP8500876 A JP 8500876A JP 8500876 A JP8500876 A JP 8500876A JP S5311037 A JPS5311037 A JP S5311037A
Authority
JP
Japan
Prior art keywords
thin film
thermal head
film thermal
resistivity
wanted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8500876A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5637071B2 (enExample
Inventor
Mitsuhiko Tashiro
Shozo Takeno
Kakuo Mihara
Tadayoshi Kinoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marcon Electronics Co Ltd
Toshiba Corp
Original Assignee
Marcon Electronics Co Ltd
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marcon Electronics Co Ltd, Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Marcon Electronics Co Ltd
Priority to JP8500876A priority Critical patent/JPS5311037A/ja
Priority to US05/816,144 priority patent/US4105892A/en
Publication of JPS5311037A publication Critical patent/JPS5311037A/ja
Publication of JPS5637071B2 publication Critical patent/JPS5637071B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Electronic Switches (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
JP8500876A 1976-07-19 1976-07-19 Thin film thermal head Granted JPS5311037A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8500876A JPS5311037A (en) 1976-07-19 1976-07-19 Thin film thermal head
US05/816,144 US4105892A (en) 1976-07-19 1977-07-15 Thin resistor film type thermal head for printing on heat-sensitive paper

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8500876A JPS5311037A (en) 1976-07-19 1976-07-19 Thin film thermal head

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP9397180A Division JPS56150575A (en) 1980-07-11 1980-07-11 Production of thin film thermal head

Publications (2)

Publication Number Publication Date
JPS5311037A true JPS5311037A (en) 1978-02-01
JPS5637071B2 JPS5637071B2 (enExample) 1981-08-28

Family

ID=13846706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8500876A Granted JPS5311037A (en) 1976-07-19 1976-07-19 Thin film thermal head

Country Status (2)

Country Link
US (1) US4105892A (enExample)
JP (1) JPS5311037A (enExample)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122728U (enExample) * 1978-02-15 1979-08-28
JPS55117671A (en) * 1979-03-02 1980-09-10 Hitachi Ltd Thermal printing head
JPS5761582A (en) * 1980-10-01 1982-04-14 Toshiba Corp Thermal printing head method of manufacutre thereof
JPS5762729U (enExample) * 1980-09-26 1982-04-14
JPS5761581A (en) * 1980-10-01 1982-04-14 Toshiba Corp Method of manufacture of thermal printing head
JPS57178878A (en) * 1981-04-30 1982-11-04 Toshiba Corp Thin film heat sensitive print head
JPS59169872A (ja) * 1983-03-17 1984-09-25 Mitsubishi Electric Corp サ−マルヘツド及びその製造方法
JPS61131515A (ja) * 1984-11-30 1986-06-19 株式会社東芝 サ−マルヘツドの製造方法
JPS61172303A (ja) * 1985-12-26 1986-08-04 株式会社東芝 薄膜抵抗用スパツタリング焼結体ターゲツト
JPS62167056A (ja) * 1986-01-20 1987-07-23 Kyocera Corp サ−マルヘツド
JPS62202756A (ja) * 1986-03-03 1987-09-07 Tdk Corp 薄膜型サ−マルヘツド
JPS62202755A (ja) * 1986-03-03 1987-09-07 Tdk Corp 薄膜型サ−マルヘツド
JPS62202754A (ja) * 1986-03-03 1987-09-07 Tdk Corp 薄膜型サ−マルヘツド
JPS6455253A (en) * 1987-08-26 1989-03-02 Hitachi Ltd Thermal head
DE4317944A1 (de) * 1992-05-29 1993-12-09 Hitachi Koki Kk Tintenstrahl-Bildaufzeichnungsgerät
US5831648A (en) * 1992-05-29 1998-11-03 Hitachi Koki Co., Ltd. Ink jet recording head
US5966153A (en) * 1995-12-27 1999-10-12 Hitachi Koki Co., Ltd. Ink jet printing device
US6547372B1 (en) 2001-07-27 2003-04-15 Kyocera Corporation Ink jet head

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4169032A (en) * 1978-05-24 1979-09-25 International Business Machines Corporation Method of making a thin film thermal print head
US4396687A (en) * 1980-12-08 1983-08-02 Ford Motor Company Chemically regenerable redox fuel cell and method of operating the same
US4407902A (en) * 1980-12-08 1983-10-04 Ford Motor Company Chemically regenerable redox fuel cell and method of operating the same
US4523235A (en) * 1982-01-11 1985-06-11 Jan Rajchman Electronic microcopier apparatus
US4558331A (en) * 1984-05-07 1985-12-10 Honeywell Inc. Heating resistor shape in a thermal printhead
JPS61159701A (ja) * 1984-12-28 1986-07-19 株式会社東芝 サ−マルヘツドおよびその製造方法
JPS61181101A (ja) * 1985-02-07 1986-08-13 アルプス電気株式会社 サ−マルヘツドおよびその製造方法
EP0211331A3 (en) * 1985-08-02 1989-10-25 Hitachi, Ltd. Heat-sensitive recording head and method of manufacturing same
DE3810667A1 (de) * 1988-03-29 1989-10-19 Siemens Ag Elektrisches widerstandsmaterial fuer elektrothermische wandler in duennschichttechnik
EP0630749B1 (en) * 1993-06-28 1998-12-23 Canon Kabushiki Kaisha Heat generating resistor containing TaN0.8, substrate provided with said heat generating resistor for liquid jet head, liquid jet head provided with said substrate, and liquid jet apparatus provided with said liquid jet head
DE69723372T2 (de) * 1996-08-22 2004-07-01 Canon K.K. Tintenstrahlkopfsubstrat, Verfahren zum Herstellen des Substrats, Tintenstrahlaufzeichnungskopf mit dem Substrat und Verfahren zur Herstellung des Kopfes
US6527813B1 (en) 1996-08-22 2003-03-04 Canon Kabushiki Kaisha Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head
US6299294B1 (en) * 1999-07-29 2001-10-09 Hewlett-Packard Company High efficiency printhead containing a novel oxynitride-based resistor system
JP3935687B2 (ja) * 2001-06-20 2007-06-27 アルプス電気株式会社 薄膜抵抗素子およびその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52109947A (en) * 1976-03-11 1977-09-14 Matsushita Electric Ind Co Ltd Thermal head and its preparation

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3518406A (en) * 1967-06-19 1970-06-30 Ncr Co Thermal half-select printing matrix

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52109947A (en) * 1976-03-11 1977-09-14 Matsushita Electric Ind Co Ltd Thermal head and its preparation

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54122728U (enExample) * 1978-02-15 1979-08-28
JPS55117671A (en) * 1979-03-02 1980-09-10 Hitachi Ltd Thermal printing head
JPS5762729U (enExample) * 1980-09-26 1982-04-14
JPS5761582A (en) * 1980-10-01 1982-04-14 Toshiba Corp Thermal printing head method of manufacutre thereof
JPS5761581A (en) * 1980-10-01 1982-04-14 Toshiba Corp Method of manufacture of thermal printing head
JPS57178878A (en) * 1981-04-30 1982-11-04 Toshiba Corp Thin film heat sensitive print head
JPS59169872A (ja) * 1983-03-17 1984-09-25 Mitsubishi Electric Corp サ−マルヘツド及びその製造方法
JPS61131515A (ja) * 1984-11-30 1986-06-19 株式会社東芝 サ−マルヘツドの製造方法
JPS61172303A (ja) * 1985-12-26 1986-08-04 株式会社東芝 薄膜抵抗用スパツタリング焼結体ターゲツト
JPS62167056A (ja) * 1986-01-20 1987-07-23 Kyocera Corp サ−マルヘツド
JPS62202756A (ja) * 1986-03-03 1987-09-07 Tdk Corp 薄膜型サ−マルヘツド
JPS62202755A (ja) * 1986-03-03 1987-09-07 Tdk Corp 薄膜型サ−マルヘツド
JPS62202754A (ja) * 1986-03-03 1987-09-07 Tdk Corp 薄膜型サ−マルヘツド
JPS6455253A (en) * 1987-08-26 1989-03-02 Hitachi Ltd Thermal head
DE4317944A1 (de) * 1992-05-29 1993-12-09 Hitachi Koki Kk Tintenstrahl-Bildaufzeichnungsgerät
US5710583A (en) * 1992-05-29 1998-01-20 Hitachi Koki Co., Ltd. Ink jet image recorder
US5831648A (en) * 1992-05-29 1998-11-03 Hitachi Koki Co., Ltd. Ink jet recording head
US5966153A (en) * 1995-12-27 1999-10-12 Hitachi Koki Co., Ltd. Ink jet printing device
US6547372B1 (en) 2001-07-27 2003-04-15 Kyocera Corporation Ink jet head

Also Published As

Publication number Publication date
JPS5637071B2 (enExample) 1981-08-28
US4105892A (en) 1978-08-08

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