JPS5311037A - Thin film thermal head - Google Patents
Thin film thermal headInfo
- Publication number
- JPS5311037A JPS5311037A JP8500876A JP8500876A JPS5311037A JP S5311037 A JPS5311037 A JP S5311037A JP 8500876 A JP8500876 A JP 8500876A JP 8500876 A JP8500876 A JP 8500876A JP S5311037 A JPS5311037 A JP S5311037A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- thermal head
- film thermal
- resistivity
- wanted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
- H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
- H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Electronic Switches (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8500876A JPS5311037A (en) | 1976-07-19 | 1976-07-19 | Thin film thermal head |
| US05/816,144 US4105892A (en) | 1976-07-19 | 1977-07-15 | Thin resistor film type thermal head for printing on heat-sensitive paper |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8500876A JPS5311037A (en) | 1976-07-19 | 1976-07-19 | Thin film thermal head |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9397180A Division JPS56150575A (en) | 1980-07-11 | 1980-07-11 | Production of thin film thermal head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5311037A true JPS5311037A (en) | 1978-02-01 |
| JPS5637071B2 JPS5637071B2 (enExample) | 1981-08-28 |
Family
ID=13846706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8500876A Granted JPS5311037A (en) | 1976-07-19 | 1976-07-19 | Thin film thermal head |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US4105892A (enExample) |
| JP (1) | JPS5311037A (enExample) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54122728U (enExample) * | 1978-02-15 | 1979-08-28 | ||
| JPS55117671A (en) * | 1979-03-02 | 1980-09-10 | Hitachi Ltd | Thermal printing head |
| JPS5761582A (en) * | 1980-10-01 | 1982-04-14 | Toshiba Corp | Thermal printing head method of manufacutre thereof |
| JPS5762729U (enExample) * | 1980-09-26 | 1982-04-14 | ||
| JPS5761581A (en) * | 1980-10-01 | 1982-04-14 | Toshiba Corp | Method of manufacture of thermal printing head |
| JPS57178878A (en) * | 1981-04-30 | 1982-11-04 | Toshiba Corp | Thin film heat sensitive print head |
| JPS59169872A (ja) * | 1983-03-17 | 1984-09-25 | Mitsubishi Electric Corp | サ−マルヘツド及びその製造方法 |
| JPS61131515A (ja) * | 1984-11-30 | 1986-06-19 | 株式会社東芝 | サ−マルヘツドの製造方法 |
| JPS61172303A (ja) * | 1985-12-26 | 1986-08-04 | 株式会社東芝 | 薄膜抵抗用スパツタリング焼結体ターゲツト |
| JPS62167056A (ja) * | 1986-01-20 | 1987-07-23 | Kyocera Corp | サ−マルヘツド |
| JPS62202756A (ja) * | 1986-03-03 | 1987-09-07 | Tdk Corp | 薄膜型サ−マルヘツド |
| JPS62202754A (ja) * | 1986-03-03 | 1987-09-07 | Tdk Corp | 薄膜型サ−マルヘツド |
| JPS62202755A (ja) * | 1986-03-03 | 1987-09-07 | Tdk Corp | 薄膜型サ−マルヘツド |
| JPS6455253A (en) * | 1987-08-26 | 1989-03-02 | Hitachi Ltd | Thermal head |
| DE4317944A1 (de) * | 1992-05-29 | 1993-12-09 | Hitachi Koki Kk | Tintenstrahl-Bildaufzeichnungsgerät |
| US5831648A (en) * | 1992-05-29 | 1998-11-03 | Hitachi Koki Co., Ltd. | Ink jet recording head |
| US5966153A (en) * | 1995-12-27 | 1999-10-12 | Hitachi Koki Co., Ltd. | Ink jet printing device |
| US6547372B1 (en) | 2001-07-27 | 2003-04-15 | Kyocera Corporation | Ink jet head |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4169032A (en) * | 1978-05-24 | 1979-09-25 | International Business Machines Corporation | Method of making a thin film thermal print head |
| US4396687A (en) * | 1980-12-08 | 1983-08-02 | Ford Motor Company | Chemically regenerable redox fuel cell and method of operating the same |
| US4407902A (en) * | 1980-12-08 | 1983-10-04 | Ford Motor Company | Chemically regenerable redox fuel cell and method of operating the same |
| US4523235A (en) * | 1982-01-11 | 1985-06-11 | Jan Rajchman | Electronic microcopier apparatus |
| US4558331A (en) * | 1984-05-07 | 1985-12-10 | Honeywell Inc. | Heating resistor shape in a thermal printhead |
| JPS61159701A (ja) * | 1984-12-28 | 1986-07-19 | 株式会社東芝 | サ−マルヘツドおよびその製造方法 |
| JPS61181101A (ja) * | 1985-02-07 | 1986-08-13 | アルプス電気株式会社 | サ−マルヘツドおよびその製造方法 |
| EP0211331A3 (en) * | 1985-08-02 | 1989-10-25 | Hitachi, Ltd. | Heat-sensitive recording head and method of manufacturing same |
| DE3810667A1 (de) * | 1988-03-29 | 1989-10-19 | Siemens Ag | Elektrisches widerstandsmaterial fuer elektrothermische wandler in duennschichttechnik |
| ATE174842T1 (de) * | 1993-06-28 | 1999-01-15 | Canon Kk | Wärmeerzeugender, tano.8 enthaltender widerstand, substrat mit diesem wärmeerzeugenden widerstand für flüssigkeitsstrahlkopf, flüssigkeitsstrahlkopf mit diesem substrat, und gerät für einen flüssigkeitsstrahl mit diesem flüssigkeitsstrahlkopf |
| US6527813B1 (en) * | 1996-08-22 | 2003-03-04 | Canon Kabushiki Kaisha | Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head |
| ES2201231T3 (es) * | 1996-08-22 | 2004-03-16 | Canon Kabushiki Kaisha | Substrato para cabezal de impresion por chorros tinta, metodo para fabricacion del mismo, cabezal de impresion por chorros de tinta dotado de dicho substrato, y metodo para fabricacion de dicho cabezal. |
| US6299294B1 (en) * | 1999-07-29 | 2001-10-09 | Hewlett-Packard Company | High efficiency printhead containing a novel oxynitride-based resistor system |
| JP3935687B2 (ja) * | 2001-06-20 | 2007-06-27 | アルプス電気株式会社 | 薄膜抵抗素子およびその製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109947A (en) * | 1976-03-11 | 1977-09-14 | Matsushita Electric Ind Co Ltd | Thermal head and its preparation |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3518406A (en) * | 1967-06-19 | 1970-06-30 | Ncr Co | Thermal half-select printing matrix |
-
1976
- 1976-07-19 JP JP8500876A patent/JPS5311037A/ja active Granted
-
1977
- 1977-07-15 US US05/816,144 patent/US4105892A/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109947A (en) * | 1976-03-11 | 1977-09-14 | Matsushita Electric Ind Co Ltd | Thermal head and its preparation |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54122728U (enExample) * | 1978-02-15 | 1979-08-28 | ||
| JPS55117671A (en) * | 1979-03-02 | 1980-09-10 | Hitachi Ltd | Thermal printing head |
| JPS5762729U (enExample) * | 1980-09-26 | 1982-04-14 | ||
| JPS5761582A (en) * | 1980-10-01 | 1982-04-14 | Toshiba Corp | Thermal printing head method of manufacutre thereof |
| JPS5761581A (en) * | 1980-10-01 | 1982-04-14 | Toshiba Corp | Method of manufacture of thermal printing head |
| JPS57178878A (en) * | 1981-04-30 | 1982-11-04 | Toshiba Corp | Thin film heat sensitive print head |
| JPS59169872A (ja) * | 1983-03-17 | 1984-09-25 | Mitsubishi Electric Corp | サ−マルヘツド及びその製造方法 |
| JPS61131515A (ja) * | 1984-11-30 | 1986-06-19 | 株式会社東芝 | サ−マルヘツドの製造方法 |
| JPS61172303A (ja) * | 1985-12-26 | 1986-08-04 | 株式会社東芝 | 薄膜抵抗用スパツタリング焼結体ターゲツト |
| JPS62167056A (ja) * | 1986-01-20 | 1987-07-23 | Kyocera Corp | サ−マルヘツド |
| JPS62202756A (ja) * | 1986-03-03 | 1987-09-07 | Tdk Corp | 薄膜型サ−マルヘツド |
| JPS62202754A (ja) * | 1986-03-03 | 1987-09-07 | Tdk Corp | 薄膜型サ−マルヘツド |
| JPS62202755A (ja) * | 1986-03-03 | 1987-09-07 | Tdk Corp | 薄膜型サ−マルヘツド |
| JPS6455253A (en) * | 1987-08-26 | 1989-03-02 | Hitachi Ltd | Thermal head |
| DE4317944A1 (de) * | 1992-05-29 | 1993-12-09 | Hitachi Koki Kk | Tintenstrahl-Bildaufzeichnungsgerät |
| US5710583A (en) * | 1992-05-29 | 1998-01-20 | Hitachi Koki Co., Ltd. | Ink jet image recorder |
| US5831648A (en) * | 1992-05-29 | 1998-11-03 | Hitachi Koki Co., Ltd. | Ink jet recording head |
| US5966153A (en) * | 1995-12-27 | 1999-10-12 | Hitachi Koki Co., Ltd. | Ink jet printing device |
| US6547372B1 (en) | 2001-07-27 | 2003-04-15 | Kyocera Corporation | Ink jet head |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5637071B2 (enExample) | 1981-08-28 |
| US4105892A (en) | 1978-08-08 |
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