JPS5299894A - Measuring apparatus and process for standard of ion contamination - Google Patents

Measuring apparatus and process for standard of ion contamination

Info

Publication number
JPS5299894A
JPS5299894A JP504277A JP504277A JPS5299894A JP S5299894 A JPS5299894 A JP S5299894A JP 504277 A JP504277 A JP 504277A JP 504277 A JP504277 A JP 504277A JP S5299894 A JPS5299894 A JP S5299894A
Authority
JP
Japan
Prior art keywords
standard
measuring apparatus
ion contamination
contamination
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP504277A
Other languages
English (en)
Inventor
Daburiyu Urufuguramu Edogaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kenko Alloy & Chem Co
Original Assignee
Kenko Alloy & Chem Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kenko Alloy & Chem Co filed Critical Kenko Alloy & Chem Co
Publication of JPS5299894A publication Critical patent/JPS5299894A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Computer Hardware Design (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP504277A 1976-02-17 1977-01-21 Measuring apparatus and process for standard of ion contamination Pending JPS5299894A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/658,182 US4023931A (en) 1976-02-17 1976-02-17 Means and method for measuring levels of ionic contamination

Publications (1)

Publication Number Publication Date
JPS5299894A true JPS5299894A (en) 1977-08-22

Family

ID=24640230

Family Applications (2)

Application Number Title Priority Date Filing Date
JP504277A Pending JPS5299894A (en) 1976-02-17 1977-01-21 Measuring apparatus and process for standard of ion contamination
JP1983052770U Granted JPS58175451U (ja) 1976-02-17 1983-04-11 イオン汚染の基準を測定する装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP1983052770U Granted JPS58175451U (ja) 1976-02-17 1983-04-11 イオン汚染の基準を測定する装置

Country Status (6)

Country Link
US (1) US4023931A (ja)
JP (2) JPS5299894A (ja)
DE (1) DE2706834C2 (ja)
FR (1) FR2342005A1 (ja)
GB (1) GB1516812A (ja)
NL (1) NL7701496A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59214750A (ja) * 1983-05-20 1984-12-04 Mitsubishi Electric Corp ナトリウムイオン物質濃度の連続モニタ−装置

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4434233A (en) 1981-03-03 1984-02-28 Carrier Corporation Method of testing oil for ionic contaminants
GB2128335A (en) * 1982-08-13 1984-04-26 Omnium Assets Trust Syndicate Measuring conductivity of a soil sample
US4731154A (en) * 1986-06-23 1988-03-15 The Dow Chemical Company Method and apparatus for quantitative measurement of organic contaminants remaining on cleaned surfaces
WO1988004962A1 (en) * 1986-12-24 1988-07-14 Fry Metals Inc. Apparatus and method for determining surface ionic contamination levels of electronic assemblies such as printed circuit assemblies
US4996160A (en) * 1987-06-09 1991-02-26 The Dow Chemical Company Method and apparatus for quantitative measurement of ionic and organic contaminants remaining on cleaned surfaces
US4922205A (en) * 1989-06-08 1990-05-01 Rikagaku Kenkyusho Apparatus for detecting contamination on probe surface
US5359282A (en) * 1990-11-16 1994-10-25 Nichimen Kabushiki Kaisha Plasma diagnosing apparatus
US5201958A (en) * 1991-11-12 1993-04-13 Electronic Controls Design, Inc. Closed-loop dual-cycle printed circuit board cleaning apparatus and method
JPH08211592A (ja) * 1995-02-07 1996-08-20 Nikon Corp 洗浄乾燥方法及び洗浄乾燥装置
DE19607795C2 (de) * 1996-03-01 1999-09-02 Temic Semiconductor Gmbh Verfahren zur Untersuchung von ionischen Verunreinigungen im Innern gemoldeter elektronischer Bauelemente
US6177279B1 (en) * 1998-11-12 2001-01-23 Memc Electronic Materials, Inc. Ion extraction process for single side wafers
US6367679B1 (en) * 2000-06-28 2002-04-09 Advanced Micro Devices, Inc. Detection of flux residue
JP2004077378A (ja) * 2002-08-21 2004-03-11 Somakkusu Kk 電解洗浄液の劣化測定装置及び該装置を用いた電解洗浄液の劣化度評価方法
KR101240333B1 (ko) * 2007-08-24 2013-03-07 삼성전자주식회사 마스크 표면에 흡착된 이온 분석 장치 및 방법
CN101334432B (zh) * 2008-07-10 2010-06-09 广东正业科技有限公司 一种离子污染检测装置
WO2010030505A1 (en) * 2008-09-10 2010-03-18 Austin American Technology Corporation Cleaning and testing ionic cleanliness of electronic assemblies
DE102016113072A1 (de) * 2016-07-15 2018-01-18 Microtronic Produktions Gmbh Kontaminationstester zum Prüfen einer ionischen Kontamination von Leiterplatten

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495093A (ja) * 1972-04-26 1974-01-17

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3366554A (en) * 1964-01-06 1968-01-30 Boeing Co Method for evaluating coating discontinuities
US3490873A (en) * 1965-08-10 1970-01-20 United Aircraft Corp Method and composition for inspecting semiconductor devices
US3459505A (en) * 1965-10-11 1969-08-05 United Carr Inc Method of testing the porosity of coated articles
DE2514905A1 (de) * 1974-04-10 1975-10-23 Philips Nv Konduktometrische analyse

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS495093A (ja) * 1972-04-26 1974-01-17

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59214750A (ja) * 1983-05-20 1984-12-04 Mitsubishi Electric Corp ナトリウムイオン物質濃度の連続モニタ−装置
JPH0249654B2 (ja) * 1983-05-20 1990-10-30 Mitsubishi Electric Corp

Also Published As

Publication number Publication date
FR2342005B1 (ja) 1980-11-14
NL7701496A (nl) 1977-08-19
DE2706834A1 (de) 1977-08-18
FR2342005A1 (fr) 1977-09-16
US4023931A (en) 1977-05-17
JPS58175451U (ja) 1983-11-24
DE2706834C2 (de) 1986-06-19
GB1516812A (en) 1978-07-05
JPH0119082Y2 (ja) 1989-06-02

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