JPS5295165A - Wafer cleansing tool - Google Patents

Wafer cleansing tool

Info

Publication number
JPS5295165A
JPS5295165A JP1145476A JP1145476A JPS5295165A JP S5295165 A JPS5295165 A JP S5295165A JP 1145476 A JP1145476 A JP 1145476A JP 1145476 A JP1145476 A JP 1145476A JP S5295165 A JPS5295165 A JP S5295165A
Authority
JP
Japan
Prior art keywords
cleansing tool
wafer
wafer cleansing
wafers
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1145476A
Other languages
Japanese (ja)
Inventor
Takashi Aoyanagi
Shogo Kiyota
Kazuo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1145476A priority Critical patent/JPS5295165A/en
Publication of JPS5295165A publication Critical patent/JPS5295165A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To prevent wafers being cleansed from moving and to eliminate the damage of wafers by holding those sustained in a groove by a up-down movable bar hung in a handle.
COPYRIGHT: (C)1977,JPO&Japio
JP1145476A 1976-02-06 1976-02-06 Wafer cleansing tool Pending JPS5295165A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1145476A JPS5295165A (en) 1976-02-06 1976-02-06 Wafer cleansing tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1145476A JPS5295165A (en) 1976-02-06 1976-02-06 Wafer cleansing tool

Publications (1)

Publication Number Publication Date
JPS5295165A true JPS5295165A (en) 1977-08-10

Family

ID=11778531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1145476A Pending JPS5295165A (en) 1976-02-06 1976-02-06 Wafer cleansing tool

Country Status (1)

Country Link
JP (1) JPS5295165A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57501257A (en) * 1980-03-06 1982-07-15
JPS57124145U (en) * 1981-01-27 1982-08-03
JPS6139545A (en) * 1984-07-31 1986-02-25 Toshiba Ceramics Co Ltd Wafer carrier

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57501257A (en) * 1980-03-06 1982-07-15
JPS57124145U (en) * 1981-01-27 1982-08-03
JPS6218034Y2 (en) * 1981-01-27 1987-05-09
JPS6139545A (en) * 1984-07-31 1986-02-25 Toshiba Ceramics Co Ltd Wafer carrier

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