JPS5295165A - Wafer cleansing tool - Google Patents
Wafer cleansing toolInfo
- Publication number
- JPS5295165A JPS5295165A JP1145476A JP1145476A JPS5295165A JP S5295165 A JPS5295165 A JP S5295165A JP 1145476 A JP1145476 A JP 1145476A JP 1145476 A JP1145476 A JP 1145476A JP S5295165 A JPS5295165 A JP S5295165A
- Authority
- JP
- Japan
- Prior art keywords
- cleansing tool
- wafer
- wafer cleansing
- wafers
- tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To prevent wafers being cleansed from moving and to eliminate the damage of wafers by holding those sustained in a groove by a up-down movable bar hung in a handle.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1145476A JPS5295165A (en) | 1976-02-06 | 1976-02-06 | Wafer cleansing tool |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1145476A JPS5295165A (en) | 1976-02-06 | 1976-02-06 | Wafer cleansing tool |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5295165A true JPS5295165A (en) | 1977-08-10 |
Family
ID=11778531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1145476A Pending JPS5295165A (en) | 1976-02-06 | 1976-02-06 | Wafer cleansing tool |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5295165A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57501257A (en) * | 1980-03-06 | 1982-07-15 | ||
JPS57124145U (en) * | 1981-01-27 | 1982-08-03 | ||
JPS6139545A (en) * | 1984-07-31 | 1986-02-25 | Toshiba Ceramics Co Ltd | Wafer carrier |
-
1976
- 1976-02-06 JP JP1145476A patent/JPS5295165A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57501257A (en) * | 1980-03-06 | 1982-07-15 | ||
JPS57124145U (en) * | 1981-01-27 | 1982-08-03 | ||
JPS6218034Y2 (en) * | 1981-01-27 | 1987-05-09 | ||
JPS6139545A (en) * | 1984-07-31 | 1986-02-25 | Toshiba Ceramics Co Ltd | Wafer carrier |
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