JPS5278374A - Production of oxide insulated film - Google Patents

Production of oxide insulated film

Info

Publication number
JPS5278374A
JPS5278374A JP15527875A JP15527875A JPS5278374A JP S5278374 A JPS5278374 A JP S5278374A JP 15527875 A JP15527875 A JP 15527875A JP 15527875 A JP15527875 A JP 15527875A JP S5278374 A JPS5278374 A JP S5278374A
Authority
JP
Japan
Prior art keywords
production
insulated film
oxide insulated
oxide
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15527875A
Other languages
Japanese (ja)
Inventor
Satoru Shoji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15527875A priority Critical patent/JPS5278374A/en
Publication of JPS5278374A publication Critical patent/JPS5278374A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To realize the simplification of production process without radiating light and without using a silicon nitride film for a masking material and to obtain a thick oxide insulating film of more than 1μm, at the time of making an N type silicon porous.
COPYRIGHT: (C)1977,JPO&Japio
JP15527875A 1975-12-25 1975-12-25 Production of oxide insulated film Pending JPS5278374A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15527875A JPS5278374A (en) 1975-12-25 1975-12-25 Production of oxide insulated film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15527875A JPS5278374A (en) 1975-12-25 1975-12-25 Production of oxide insulated film

Publications (1)

Publication Number Publication Date
JPS5278374A true JPS5278374A (en) 1977-07-01

Family

ID=15602395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15527875A Pending JPS5278374A (en) 1975-12-25 1975-12-25 Production of oxide insulated film

Country Status (1)

Country Link
JP (1) JPS5278374A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7595230B2 (en) 2004-02-16 2009-09-29 Sharp Kabushiki Kaisha Thin film transistor, method of manufacturing same, display device, method of modifying an oxide film, method of forming an oxide film, semiconductor device, method of manufacturing semiconductor device, and apparatus for manufacturing semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7595230B2 (en) 2004-02-16 2009-09-29 Sharp Kabushiki Kaisha Thin film transistor, method of manufacturing same, display device, method of modifying an oxide film, method of forming an oxide film, semiconductor device, method of manufacturing semiconductor device, and apparatus for manufacturing semiconductor device
US8039403B2 (en) 2004-02-16 2011-10-18 Sharp Kabushiki Kaisha Thin film transistor, method of manufacturing same, display device, method of modifying an oxide film, method of forming an oxide film, semiconductor device, method of manufacturing semiconductor device, and apparatus for manufacturing semiconductor device

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