JPS5268879A - Formation method of gas phase growth film - Google Patents

Formation method of gas phase growth film

Info

Publication number
JPS5268879A
JPS5268879A JP14500875A JP14500875A JPS5268879A JP S5268879 A JPS5268879 A JP S5268879A JP 14500875 A JP14500875 A JP 14500875A JP 14500875 A JP14500875 A JP 14500875A JP S5268879 A JPS5268879 A JP S5268879A
Authority
JP
Japan
Prior art keywords
gas phase
phase growth
formation method
growth film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14500875A
Other languages
English (en)
Inventor
Takeo Yoshimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14500875A priority Critical patent/JPS5268879A/ja
Publication of JPS5268879A publication Critical patent/JPS5268879A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP14500875A 1975-12-08 1975-12-08 Formation method of gas phase growth film Pending JPS5268879A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14500875A JPS5268879A (en) 1975-12-08 1975-12-08 Formation method of gas phase growth film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14500875A JPS5268879A (en) 1975-12-08 1975-12-08 Formation method of gas phase growth film

Publications (1)

Publication Number Publication Date
JPS5268879A true JPS5268879A (en) 1977-06-08

Family

ID=15375304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14500875A Pending JPS5268879A (en) 1975-12-08 1975-12-08 Formation method of gas phase growth film

Country Status (1)

Country Link
JP (1) JPS5268879A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63213923A (ja) * 1987-03-03 1988-09-06 Mitsubishi Cable Ind Ltd 薄膜のモニタ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63213923A (ja) * 1987-03-03 1988-09-06 Mitsubishi Cable Ind Ltd 薄膜のモニタ装置

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