JPS5264876A - Semiconductor surface treating agent - Google Patents

Semiconductor surface treating agent

Info

Publication number
JPS5264876A
JPS5264876A JP14072375A JP14072375A JPS5264876A JP S5264876 A JPS5264876 A JP S5264876A JP 14072375 A JP14072375 A JP 14072375A JP 14072375 A JP14072375 A JP 14072375A JP S5264876 A JPS5264876 A JP S5264876A
Authority
JP
Japan
Prior art keywords
treating agent
surface treating
semiconductor surface
perixide
hydroxylalkyl
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14072375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5343012B2 (cs
Inventor
Hisashi Muraoka
Masafumi Asano
Taizo Ohashi
Yuzo Shimazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14072375A priority Critical patent/JPS5264876A/ja
Priority to GB190379A priority patent/GB1573207A/en
Priority to GB35164/76A priority patent/GB1573206A/en
Priority to GB190479A priority patent/GB1573208A/en
Priority to DE2639004A priority patent/DE2639004C2/de
Priority to NLAANVRAGE7609602,A priority patent/NL185116C/xx
Publication of JPS5264876A publication Critical patent/JPS5264876A/ja
Priority to US05/927,139 priority patent/US4239661A/en
Publication of JPS5343012B2 publication Critical patent/JPS5343012B2/ja
Priority to US06/213,317 priority patent/US4339340A/en
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
JP14072375A 1975-11-26 1975-11-26 Semiconductor surface treating agent Granted JPS5264876A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP14072375A JPS5264876A (en) 1975-11-26 1975-11-26 Semiconductor surface treating agent
GB190379A GB1573207A (en) 1975-11-26 1976-08-24 Surface treating agent adapted of intermediate products ofa semiconductor device
GB35164/76A GB1573206A (en) 1975-11-26 1976-08-24 Method of trating surfaces of intermediate products obtained in the manufacture of semiconductor devices
GB190479A GB1573208A (en) 1975-11-26 1976-08-24 Surface treating agent adapted for intermediate products of a semiconductor device
DE2639004A DE2639004C2 (de) 1975-11-26 1976-08-30 Wäßrige Lösung zur Oberflächenbehandlung von Zwischenprodukten bei der Herstellung von Halbleiterbauelementen
NLAANVRAGE7609602,A NL185116C (nl) 1975-11-26 1976-08-30 Werkwijze voor het behandelen van oppervlakken van tussenprodukten bij het vervaardigen van halfgeleiders.
US05/927,139 US4239661A (en) 1975-11-26 1978-07-21 Surface-treating agent adapted for intermediate products of a semiconductor device
US06/213,317 US4339340A (en) 1975-11-26 1980-12-05 Surface-treating agent adapted for intermediate products of a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14072375A JPS5264876A (en) 1975-11-26 1975-11-26 Semiconductor surface treating agent

Publications (2)

Publication Number Publication Date
JPS5264876A true JPS5264876A (en) 1977-05-28
JPS5343012B2 JPS5343012B2 (cs) 1978-11-16

Family

ID=15275199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14072375A Granted JPS5264876A (en) 1975-11-26 1975-11-26 Semiconductor surface treating agent

Country Status (1)

Country Link
JP (1) JPS5264876A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6348830A (ja) * 1986-08-19 1988-03-01 Toshiba Corp 半導体表面処理方法
US5174816A (en) * 1990-06-14 1992-12-29 Mitsubishi Gas Chemical Company, Inc. Surface treating agent for aluminum line pattern substrate
US5196134A (en) * 1989-12-20 1993-03-23 Hughes Aircraft Company Peroxide composition for removing organic contaminants and method of using same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6348830A (ja) * 1986-08-19 1988-03-01 Toshiba Corp 半導体表面処理方法
US5196134A (en) * 1989-12-20 1993-03-23 Hughes Aircraft Company Peroxide composition for removing organic contaminants and method of using same
US5174816A (en) * 1990-06-14 1992-12-29 Mitsubishi Gas Chemical Company, Inc. Surface treating agent for aluminum line pattern substrate

Also Published As

Publication number Publication date
JPS5343012B2 (cs) 1978-11-16

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