JPS5261795A - Production of dielectric thin film - Google Patents
Production of dielectric thin filmInfo
- Publication number
- JPS5261795A JPS5261795A JP50138315A JP13831575A JPS5261795A JP S5261795 A JPS5261795 A JP S5261795A JP 50138315 A JP50138315 A JP 50138315A JP 13831575 A JP13831575 A JP 13831575A JP S5261795 A JPS5261795 A JP S5261795A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- production
- dielectric thin
- spattering
- adhering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Inorganic Insulating Materials (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50138315A JPS5261795A (en) | 1975-11-17 | 1975-11-17 | Production of dielectric thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50138315A JPS5261795A (en) | 1975-11-17 | 1975-11-17 | Production of dielectric thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5261795A true JPS5261795A (en) | 1977-05-21 |
| JPS5619933B2 JPS5619933B2 (Direct) | 1981-05-11 |
Family
ID=15219009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50138315A Granted JPS5261795A (en) | 1975-11-17 | 1975-11-17 | Production of dielectric thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5261795A (Direct) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017151408A (ja) * | 2016-02-22 | 2017-08-31 | 株式会社タムロン | 赤外線透過膜、光学膜、反射防止膜、光学部品、光学系及び撮像装置 |
-
1975
- 1975-11-17 JP JP50138315A patent/JPS5261795A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5619933B2 (Direct) | 1981-05-11 |
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