JPS5258896A - Production of dielectric thin film - Google Patents

Production of dielectric thin film

Info

Publication number
JPS5258896A
JPS5258896A JP50135775A JP13577575A JPS5258896A JP S5258896 A JPS5258896 A JP S5258896A JP 50135775 A JP50135775 A JP 50135775A JP 13577575 A JP13577575 A JP 13577575A JP S5258896 A JPS5258896 A JP S5258896A
Authority
JP
Japan
Prior art keywords
thin film
production
dielectric thin
microwaves
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50135775A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5623524B2 (it
Inventor
Tsuneo Mitsuyu
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50135775A priority Critical patent/JPS5258896A/ja
Publication of JPS5258896A publication Critical patent/JPS5258896A/ja
Publication of JPS5623524B2 publication Critical patent/JPS5623524B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Insulating Materials (AREA)
JP50135775A 1975-11-11 1975-11-11 Production of dielectric thin film Granted JPS5258896A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50135775A JPS5258896A (en) 1975-11-11 1975-11-11 Production of dielectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50135775A JPS5258896A (en) 1975-11-11 1975-11-11 Production of dielectric thin film

Publications (2)

Publication Number Publication Date
JPS5258896A true JPS5258896A (en) 1977-05-14
JPS5623524B2 JPS5623524B2 (it) 1981-06-01

Family

ID=15159555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50135775A Granted JPS5258896A (en) 1975-11-11 1975-11-11 Production of dielectric thin film

Country Status (1)

Country Link
JP (1) JPS5258896A (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4792463A (en) * 1985-09-17 1988-12-20 Masaru Okada Method of producing ferroelectric thin film

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111167U (it) * 1987-01-12 1988-07-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4792463A (en) * 1985-09-17 1988-12-20 Masaru Okada Method of producing ferroelectric thin film

Also Published As

Publication number Publication date
JPS5623524B2 (it) 1981-06-01

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