JPS5258896A - Production of dielectric thin film - Google Patents
Production of dielectric thin filmInfo
- Publication number
- JPS5258896A JPS5258896A JP50135775A JP13577575A JPS5258896A JP S5258896 A JPS5258896 A JP S5258896A JP 50135775 A JP50135775 A JP 50135775A JP 13577575 A JP13577575 A JP 13577575A JP S5258896 A JPS5258896 A JP S5258896A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- production
- dielectric thin
- microwaves
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- 229910000416 bismuth oxide Inorganic materials 0.000 abstract 1
- 229910000464 lead oxide Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50135775A JPS5258896A (en) | 1975-11-11 | 1975-11-11 | Production of dielectric thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50135775A JPS5258896A (en) | 1975-11-11 | 1975-11-11 | Production of dielectric thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5258896A true JPS5258896A (en) | 1977-05-14 |
JPS5623524B2 JPS5623524B2 (it) | 1981-06-01 |
Family
ID=15159555
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50135775A Granted JPS5258896A (en) | 1975-11-11 | 1975-11-11 | Production of dielectric thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258896A (it) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4792463A (en) * | 1985-09-17 | 1988-12-20 | Masaru Okada | Method of producing ferroelectric thin film |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63111167U (it) * | 1987-01-12 | 1988-07-16 |
-
1975
- 1975-11-11 JP JP50135775A patent/JPS5258896A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4792463A (en) * | 1985-09-17 | 1988-12-20 | Masaru Okada | Method of producing ferroelectric thin film |
Also Published As
Publication number | Publication date |
---|---|
JPS5623524B2 (it) | 1981-06-01 |
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