JPS5258898A - Production of dielectric thin film - Google Patents

Production of dielectric thin film

Info

Publication number
JPS5258898A
JPS5258898A JP50135777A JP13577775A JPS5258898A JP S5258898 A JPS5258898 A JP S5258898A JP 50135777 A JP50135777 A JP 50135777A JP 13577775 A JP13577775 A JP 13577775A JP S5258898 A JPS5258898 A JP S5258898A
Authority
JP
Japan
Prior art keywords
thin film
dielectric thin
production
piezoelectricity
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50135777A
Other languages
Japanese (ja)
Other versions
JPS5623525B2 (en
Inventor
Tsuneo Mitsuyu
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50135777A priority Critical patent/JPS5258898A/en
Publication of JPS5258898A publication Critical patent/JPS5258898A/en
Publication of JPS5623525B2 publication Critical patent/JPS5623525B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Insulating Materials (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE: To produce materials for ultrasonic transducers having no piezoelectricity and low sonic speed by forming a dielectric thin film of a face centered cubic structure of bismuth oxides containing iron oxides on a substrate kept at a specified temperature through ion impact vapor deposition.
COPYRIGHT: (C)1977,JPO&Japio
JP50135777A 1975-11-11 1975-11-11 Production of dielectric thin film Granted JPS5258898A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50135777A JPS5258898A (en) 1975-11-11 1975-11-11 Production of dielectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50135777A JPS5258898A (en) 1975-11-11 1975-11-11 Production of dielectric thin film

Publications (2)

Publication Number Publication Date
JPS5258898A true JPS5258898A (en) 1977-05-14
JPS5623525B2 JPS5623525B2 (en) 1981-06-01

Family

ID=15159602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50135777A Granted JPS5258898A (en) 1975-11-11 1975-11-11 Production of dielectric thin film

Country Status (1)

Country Link
JP (1) JPS5258898A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01164972U (en) * 1988-05-07 1989-11-17

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01164972U (en) * 1988-05-07 1989-11-17

Also Published As

Publication number Publication date
JPS5623525B2 (en) 1981-06-01

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