JPS5258898A - Production of dielectric thin film - Google Patents
Production of dielectric thin filmInfo
- Publication number
- JPS5258898A JPS5258898A JP50135777A JP13577775A JPS5258898A JP S5258898 A JPS5258898 A JP S5258898A JP 50135777 A JP50135777 A JP 50135777A JP 13577775 A JP13577775 A JP 13577775A JP S5258898 A JPS5258898 A JP S5258898A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- dielectric thin
- production
- piezoelectricity
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Inorganic Insulating Materials (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE: To produce materials for ultrasonic transducers having no piezoelectricity and low sonic speed by forming a dielectric thin film of a face centered cubic structure of bismuth oxides containing iron oxides on a substrate kept at a specified temperature through ion impact vapor deposition.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50135777A JPS5258898A (en) | 1975-11-11 | 1975-11-11 | Production of dielectric thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50135777A JPS5258898A (en) | 1975-11-11 | 1975-11-11 | Production of dielectric thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5258898A true JPS5258898A (en) | 1977-05-14 |
JPS5623525B2 JPS5623525B2 (en) | 1981-06-01 |
Family
ID=15159602
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50135777A Granted JPS5258898A (en) | 1975-11-11 | 1975-11-11 | Production of dielectric thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5258898A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01164972U (en) * | 1988-05-07 | 1989-11-17 |
-
1975
- 1975-11-11 JP JP50135777A patent/JPS5258898A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01164972U (en) * | 1988-05-07 | 1989-11-17 |
Also Published As
Publication number | Publication date |
---|---|
JPS5623525B2 (en) | 1981-06-01 |
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