JPS5244190A - Corrosion-resistant wiring and method of forming the same - Google Patents

Corrosion-resistant wiring and method of forming the same

Info

Publication number
JPS5244190A
JPS5244190A JP11975175A JP11975175A JPS5244190A JP S5244190 A JPS5244190 A JP S5244190A JP 11975175 A JP11975175 A JP 11975175A JP 11975175 A JP11975175 A JP 11975175A JP S5244190 A JPS5244190 A JP S5244190A
Authority
JP
Japan
Prior art keywords
corrosion
forming
same
resistant wiring
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11975175A
Other languages
Japanese (ja)
Inventor
Toru Kawanobe
Sumio Nishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11975175A priority Critical patent/JPS5244190A/en
Publication of JPS5244190A publication Critical patent/JPS5244190A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To cover Al wiring with polycrystalline Si, Al2O3 and cover pads with corrosion-resistant metal, thereby preventing deterioration by moisture, etc.
COPYRIGHT: (C)1977,JPO&Japio
JP11975175A 1975-10-06 1975-10-06 Corrosion-resistant wiring and method of forming the same Pending JPS5244190A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11975175A JPS5244190A (en) 1975-10-06 1975-10-06 Corrosion-resistant wiring and method of forming the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11975175A JPS5244190A (en) 1975-10-06 1975-10-06 Corrosion-resistant wiring and method of forming the same

Publications (1)

Publication Number Publication Date
JPS5244190A true JPS5244190A (en) 1977-04-06

Family

ID=14769237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11975175A Pending JPS5244190A (en) 1975-10-06 1975-10-06 Corrosion-resistant wiring and method of forming the same

Country Status (1)

Country Link
JP (1) JPS5244190A (en)

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