JPS5242084A - Process for production of polycrystalline semiconductor film - Google Patents

Process for production of polycrystalline semiconductor film

Info

Publication number
JPS5242084A
JPS5242084A JP50117287A JP11728775A JPS5242084A JP S5242084 A JPS5242084 A JP S5242084A JP 50117287 A JP50117287 A JP 50117287A JP 11728775 A JP11728775 A JP 11728775A JP S5242084 A JPS5242084 A JP S5242084A
Authority
JP
Japan
Prior art keywords
production
semiconductor film
polycrystalline semiconductor
film
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50117287A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5339759B2 (enrdf_load_html_response
Inventor
Sunao Matsubara
Tadashi Saito
Hiroshi Tamura
Shigekazu Minagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50117287A priority Critical patent/JPS5242084A/ja
Publication of JPS5242084A publication Critical patent/JPS5242084A/ja
Publication of JPS5339759B2 publication Critical patent/JPS5339759B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Photovoltaic Devices (AREA)
JP50117287A 1975-09-30 1975-09-30 Process for production of polycrystalline semiconductor film Granted JPS5242084A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50117287A JPS5242084A (en) 1975-09-30 1975-09-30 Process for production of polycrystalline semiconductor film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50117287A JPS5242084A (en) 1975-09-30 1975-09-30 Process for production of polycrystalline semiconductor film

Publications (2)

Publication Number Publication Date
JPS5242084A true JPS5242084A (en) 1977-04-01
JPS5339759B2 JPS5339759B2 (enrdf_load_html_response) 1978-10-23

Family

ID=14707999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50117287A Granted JPS5242084A (en) 1975-09-30 1975-09-30 Process for production of polycrystalline semiconductor film

Country Status (1)

Country Link
JP (1) JPS5242084A (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPS5339759B2 (enrdf_load_html_response) 1978-10-23

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