JPS5235995B2 - - Google Patents

Info

Publication number
JPS5235995B2
JPS5235995B2 JP6489574A JP6489574A JPS5235995B2 JP S5235995 B2 JPS5235995 B2 JP S5235995B2 JP 6489574 A JP6489574 A JP 6489574A JP 6489574 A JP6489574 A JP 6489574A JP S5235995 B2 JPS5235995 B2 JP S5235995B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6489574A
Other versions
JPS5050873A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5050873A publication Critical patent/JPS5050873A/ja
Publication of JPS5235995B2 publication Critical patent/JPS5235995B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7069—Alignment mark illumination, e.g. darkfield, dual focus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6489574A 1973-07-27 1974-06-07 Expired JPS5235995B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US00383043A US3844655A (en) 1973-07-27 1973-07-27 Method and means for forming an aligned mask that does not include alignment marks employed in aligning the mask

Publications (2)

Publication Number Publication Date
JPS5050873A JPS5050873A (ja) 1975-05-07
JPS5235995B2 true JPS5235995B2 (ja) 1977-09-12

Family

ID=23511463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6489574A Expired JPS5235995B2 (ja) 1973-07-27 1974-06-07

Country Status (5)

Country Link
US (1) US3844655A (ja)
JP (1) JPS5235995B2 (ja)
DE (1) DE2431960C3 (ja)
FR (1) FR2245983B1 (ja)
GB (1) GB1461685A (ja)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3955072A (en) * 1971-03-22 1976-05-04 Kasper Instruments, Inc. Apparatus for the automatic alignment of two superimposed objects for example a semiconductor wafer and a transparent mask
US4052603A (en) * 1974-12-23 1977-10-04 International Business Machines Corporation Object positioning process and apparatus
US4046474A (en) * 1975-11-17 1977-09-06 Rockwell International Corporation Black-body wafer support fixture for exposure of photoresist
FR2388371A1 (fr) * 1977-04-20 1978-11-17 Thomson Csf Procede d'alignement, dans un photorepeteur, d'une plaquette semi-conductrice et des motifs a y projeter et photorepeteur mettant en oeuvre un tel procede
JPS53144270A (en) * 1977-05-23 1978-12-15 Hitachi Ltd Projection-type mask aligner
US4158501A (en) * 1977-12-27 1979-06-19 The Three Dimensional Photography Corporation Projection printing method and apparatus
DE2845603C2 (de) * 1978-10-19 1982-12-09 Censor Patent- und Versuchs-Anstalt, 9490 Vaduz Verfahren und Einrichtung zum Projektionskopieren
US4226523A (en) * 1978-11-17 1980-10-07 Energy Conversion Devices, Inc. Imaging device
DE2900921C2 (de) * 1979-01-11 1981-06-04 Censor Patent- und Versuchs-Anstalt, 9490 Vaduz Verfahren zum Projektionskopieren von Masken auf ein Werkstück
US4461567A (en) * 1979-12-20 1984-07-24 Censor Patent- Und Versuchs-Anstalt Method of and apparatus for the positioning of disk-shaped workpieces, particularly semiconductor wafers
US4376581A (en) * 1979-12-20 1983-03-15 Censor Patent- Und Versuchs-Anstalt Method of positioning disk-shaped workpieces, preferably semiconductor wafers
JPS56128946A (en) * 1980-03-14 1981-10-08 Fujitsu Ltd Photomask correcting method
US4260250A (en) * 1980-04-11 1981-04-07 Energy Conversion Devices, Inc. Imaging apparatus
DE3118802A1 (de) * 1980-05-14 1982-02-25 Canon K.K., Tokyo Druckuebertragungsgeraet
JPS589319A (ja) * 1981-07-10 1983-01-19 Hitachi Ltd パターン露光装置
DE3144849A1 (de) * 1981-11-11 1983-05-19 Siemens AG, 1000 Berlin und 8000 München Opto-elektronisches justierverfahren bei der herstellung von mehrlagenschaltungen
US4536240A (en) * 1981-12-02 1985-08-20 Advanced Semiconductor Products, Inc. Method of forming thin optical membranes
DE3265891D1 (en) * 1982-01-06 1985-10-03 Ibm Alignment system for lithographic proximity printing
JPS5978533A (ja) * 1982-10-27 1984-05-07 Canon Inc 露光装置
US4620785A (en) * 1982-12-01 1986-11-04 Canon Kabushiki Kaisha Sheet-like member having alignment marks and an alignment apparatus for the same
US4479711A (en) * 1982-12-02 1984-10-30 Canon Kabushiki Kaisha Mask aligner
JPH0732109B2 (ja) * 1983-10-07 1995-04-10 株式会社日立製作所 光露光方法
FR2560397B1 (fr) * 1984-02-28 1986-11-14 Commissariat Energie Atomique Appareil de microlithographie optique a systeme d'alignement local
EP0184820A3 (de) * 1984-12-11 1987-10-07 MANIA Elektronik Automatisation Entwicklung und Gerätebau GmbH Anordnung zur Ausrichtung von unbelichteten Leiterplattenrohlingen und Fotomasken zueinander, sowie Fotomasken zur Verwendung darin
EP0677787B1 (en) * 1994-03-15 1998-10-21 Canon Kabushiki Kaisha Mask and mask supporting mechanism
KR100197885B1 (ko) * 1996-12-23 1999-06-15 윤종용 노광설비의 기준마크 보호장치
US6497048B2 (en) * 2000-12-07 2002-12-24 Koninklijke Philips Electronics N.V. Resist-dispenser nozzle calibration tool and method thereof
US20130229200A1 (en) * 2012-03-05 2013-09-05 Star Technologies, Inc. Testing apparatus for performing an avalanche test and method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3476476A (en) * 1967-03-28 1969-11-04 Optomechanisms Inc Alignment means for photo repeat machine
US3490846A (en) * 1967-06-01 1970-01-20 Kasper Instruments Optical alignment and exposure apparatus
NL6801924A (ja) * 1968-02-10 1969-08-12
US3591284A (en) * 1968-05-27 1971-07-06 Solomon Liebman Printed circuit layout means
US3635558A (en) * 1969-11-13 1972-01-18 Chartmakers Inc The Slide production process and apparatus
US3718396A (en) * 1971-12-28 1973-02-27 Licentia Gmbh System for photographic production of semiconductor micro structures

Also Published As

Publication number Publication date
DE2431960C3 (de) 1979-06-21
JPS5050873A (ja) 1975-05-07
US3844655A (en) 1974-10-29
FR2245983A1 (ja) 1975-04-25
FR2245983B1 (ja) 1978-01-20
GB1461685A (en) 1977-01-19
DE2431960A1 (de) 1975-02-13
DE2431960B2 (de) 1978-10-19

Similar Documents

Publication Publication Date Title
AR201758A1 (ja)
AU476761B2 (ja)
AU465372B2 (ja)
AR201235Q (ja)
AR201231Q (ja)
AU474593B2 (ja)
AU474511B2 (ja)
JPS5235995B2 (ja)
AU474838B2 (ja)
AU465453B2 (ja)
AU465434B2 (ja)
AU471343B2 (ja)
AU450229B2 (ja)
AU476714B2 (ja)
AR201229Q (ja)
AU466283B2 (ja)
AU476696B2 (ja)
AU472848B2 (ja)
AR199451A1 (ja)
AU477823B2 (ja)
AR197627A1 (ja)
AU476873B1 (ja)
AR200256A1 (ja)
AR200885A1 (ja)
AR201432A1 (ja)