JPS5232954B2 - - Google Patents
Info
- Publication number
- JPS5232954B2 JPS5232954B2 JP48112424A JP11242473A JPS5232954B2 JP S5232954 B2 JPS5232954 B2 JP S5232954B2 JP 48112424 A JP48112424 A JP 48112424A JP 11242473 A JP11242473 A JP 11242473A JP S5232954 B2 JPS5232954 B2 JP S5232954B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
- H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
- H10P76/408—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes
- H10P76/4083—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes characterised by their behaviours during the lithography processes, e.g. soluble masks or redeposited masks
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
- H10W74/43—Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7213625A NL7213625A (oth) | 1972-10-07 | 1972-10-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4974483A JPS4974483A (oth) | 1974-07-18 |
| JPS5232954B2 true JPS5232954B2 (oth) | 1977-08-25 |
Family
ID=19817096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48112424A Expired JPS5232954B2 (oth) | 1972-10-07 | 1973-10-08 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3919066A (oth) |
| JP (1) | JPS5232954B2 (oth) |
| CA (1) | CA1020494A (oth) |
| FR (1) | FR2202369B2 (oth) |
| GB (1) | GB1440349A (oth) |
| IT (1) | IT1055539B (oth) |
| NL (1) | NL7213625A (oth) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4057831A (en) * | 1972-09-05 | 1977-11-08 | U.S. Philips Corporation | Video record disc manufactured by a process involving chemical or sputter etching |
| DE2547792C3 (de) * | 1974-10-25 | 1978-08-31 | Hitachi, Ltd., Tokio | Verfahren zur Herstellung eines Halbleiterbauelementes |
| JPS5210080A (en) * | 1975-07-15 | 1977-01-26 | Nippon Telegr & Teleph Corp <Ntt> | Method for manufacturing semiconductor device |
| NL7607298A (nl) * | 1976-07-02 | 1978-01-04 | Philips Nv | Werkwijze voor het vervaardigen van een inrichting en inrichting vervaardigd volgens de werkwijze. |
| JPS5381110A (en) * | 1976-12-25 | 1978-07-18 | Toshiba Corp | Manufacture of magnetic film head |
| JPS5539646A (en) * | 1978-09-12 | 1980-03-19 | Nec Corp | Ion taper etching |
| US4534826A (en) * | 1983-12-29 | 1985-08-13 | Ibm Corporation | Trench etch process for dielectric isolation |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2117199C3 (de) * | 1971-04-08 | 1974-08-22 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zur Herstellung geätzter Muster in dünnen Schichten mit definierten Kantenprofilen |
| US3723277A (en) * | 1971-07-14 | 1973-03-27 | Molekularelektronik | Method for the production of masks in the manufacture of semiconductor components |
-
1972
- 1972-10-07 NL NL7213625A patent/NL7213625A/xx unknown
-
1973
- 1973-09-26 US US400879A patent/US3919066A/en not_active Expired - Lifetime
- 1973-10-03 CA CA182,588A patent/CA1020494A/en not_active Expired
- 1973-10-04 IT IT69925/73A patent/IT1055539B/it active
- 1973-10-04 GB GB4637673A patent/GB1440349A/en not_active Expired
- 1973-10-04 FR FR7335435A patent/FR2202369B2/fr not_active Expired
- 1973-10-08 JP JP48112424A patent/JPS5232954B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1440349A (en) | 1976-06-23 |
| US3919066A (en) | 1975-11-11 |
| NL7213625A (oth) | 1974-04-09 |
| FR2202369B2 (oth) | 1976-10-01 |
| JPS4974483A (oth) | 1974-07-18 |
| FR2202369A2 (oth) | 1974-05-03 |
| IT1055539B (it) | 1982-01-11 |
| DE2348779A1 (de) | 1974-04-11 |
| CA1020494A (en) | 1977-11-08 |
| AU6103973A (en) | 1975-04-10 |
| DE2348779B2 (de) | 1976-05-26 |