JPS5226284A - Auger electron spectroscopic apparatus - Google Patents
Auger electron spectroscopic apparatusInfo
- Publication number
- JPS5226284A JPS5226284A JP50101871A JP10187175A JPS5226284A JP S5226284 A JPS5226284 A JP S5226284A JP 50101871 A JP50101871 A JP 50101871A JP 10187175 A JP10187175 A JP 10187175A JP S5226284 A JPS5226284 A JP S5226284A
- Authority
- JP
- Japan
- Prior art keywords
- auger electron
- spectroscopic apparatus
- electron spectroscopic
- sample
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50101871A JPS5226284A (en) | 1975-08-22 | 1975-08-22 | Auger electron spectroscopic apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50101871A JPS5226284A (en) | 1975-08-22 | 1975-08-22 | Auger electron spectroscopic apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5226284A true JPS5226284A (en) | 1977-02-26 |
Family
ID=14312036
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50101871A Pending JPS5226284A (en) | 1975-08-22 | 1975-08-22 | Auger electron spectroscopic apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5226284A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5813138A (ja) * | 1981-07-18 | 1983-01-25 | Mazda Motor Corp | エンジンの空燃比制御装置 |
US4454404A (en) * | 1978-05-10 | 1984-06-12 | Tokyo Shibaura Denki Kabushiki Kaisha | High frequency heating apparatus with selectable steam generating means |
JPH0192549A (ja) * | 1987-10-02 | 1989-04-11 | Hitachi Ltd | 空燃比制御装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4929882A (ja) * | 1972-07-14 | 1974-03-16 | ||
JPS5189790A (ja) * | 1975-01-02 | 1976-08-06 |
-
1975
- 1975-08-22 JP JP50101871A patent/JPS5226284A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4929882A (ja) * | 1972-07-14 | 1974-03-16 | ||
JPS5189790A (ja) * | 1975-01-02 | 1976-08-06 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4454404A (en) * | 1978-05-10 | 1984-06-12 | Tokyo Shibaura Denki Kabushiki Kaisha | High frequency heating apparatus with selectable steam generating means |
JPS5813138A (ja) * | 1981-07-18 | 1983-01-25 | Mazda Motor Corp | エンジンの空燃比制御装置 |
JPS6254989B2 (ja) * | 1981-07-18 | 1987-11-17 | Matsuda Kk | |
JPH0192549A (ja) * | 1987-10-02 | 1989-04-11 | Hitachi Ltd | 空燃比制御装置 |
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