JPS5221280A - Heater for vacuum evaporation having resistance against corrosion - Google Patents

Heater for vacuum evaporation having resistance against corrosion

Info

Publication number
JPS5221280A
JPS5221280A JP9790175A JP9790175A JPS5221280A JP S5221280 A JPS5221280 A JP S5221280A JP 9790175 A JP9790175 A JP 9790175A JP 9790175 A JP9790175 A JP 9790175A JP S5221280 A JPS5221280 A JP S5221280A
Authority
JP
Japan
Prior art keywords
heater
vacuum evaporation
resistance against
against corrosion
melting point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9790175A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5752954B2 (da
Inventor
Masahiko Nakajima
Shuzo Watanabe
Masaji Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP9790175A priority Critical patent/JPS5221280A/ja
Publication of JPS5221280A publication Critical patent/JPS5221280A/ja
Publication of JPS5752954B2 publication Critical patent/JPS5752954B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP9790175A 1975-08-12 1975-08-12 Heater for vacuum evaporation having resistance against corrosion Granted JPS5221280A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9790175A JPS5221280A (en) 1975-08-12 1975-08-12 Heater for vacuum evaporation having resistance against corrosion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9790175A JPS5221280A (en) 1975-08-12 1975-08-12 Heater for vacuum evaporation having resistance against corrosion

Publications (2)

Publication Number Publication Date
JPS5221280A true JPS5221280A (en) 1977-02-17
JPS5752954B2 JPS5752954B2 (da) 1982-11-10

Family

ID=14204626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9790175A Granted JPS5221280A (en) 1975-08-12 1975-08-12 Heater for vacuum evaporation having resistance against corrosion

Country Status (1)

Country Link
JP (1) JPS5221280A (da)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS573946A (en) * 1980-06-06 1982-01-09 Kajima Corp Constructing method of acoustic space of large space
JPS5962147U (ja) * 1982-10-20 1984-04-24 石川島播磨重工業株式会社 建造物構築用保護カバ−
JPS6272867A (ja) * 1985-09-24 1987-04-03 酒見　照始 浮き屋根
JPH0422622A (ja) * 1990-05-17 1992-01-27 Ngk Insulators Ltd ホウ化物の被覆層を有する複合耐食性電極および複合耐食性発熱体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926180A (da) * 1972-07-04 1974-03-08
JPS5017517U (da) * 1973-06-13 1975-02-25
JPS5048855U (da) * 1973-09-04 1975-05-14
JPS5074578A (da) * 1973-11-05 1975-06-19

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017517B2 (da) * 1973-02-23 1975-06-21

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926180A (da) * 1972-07-04 1974-03-08
JPS5017517U (da) * 1973-06-13 1975-02-25
JPS5048855U (da) * 1973-09-04 1975-05-14
JPS5074578A (da) * 1973-11-05 1975-06-19

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS573946A (en) * 1980-06-06 1982-01-09 Kajima Corp Constructing method of acoustic space of large space
JPS6236096B2 (da) * 1980-06-06 1987-08-05 Kajima Corp
JPS5962147U (ja) * 1982-10-20 1984-04-24 石川島播磨重工業株式会社 建造物構築用保護カバ−
JPS6272867A (ja) * 1985-09-24 1987-04-03 酒見　照始 浮き屋根
JPH0422622A (ja) * 1990-05-17 1992-01-27 Ngk Insulators Ltd ホウ化物の被覆層を有する複合耐食性電極および複合耐食性発熱体

Also Published As

Publication number Publication date
JPS5752954B2 (da) 1982-11-10

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